Positioning unit and alignment device for an optical element

A positioning unit, comprising:

• a first connecting area configured to connect to an optical element,
• a second connecting area configured to connect to an object in the vicinity of the optical element,
• at least two levers, whose respective load arm is connected via a hinged joint and via an intermediate element, which acts on this hinged joint, to the first connecting area,
• adjustment devices or actuators arranged on the respective force arms of the levers, and
• respective lever bearings connected to the second connecting area so that at least one lever bearing and/or one hinged joint of a load arm is configured to carry out a rolling movement, on deflection of the intermediate element, along a curved path, which is arranged relative to at least one member selected from the group consisting of the first connecting area, the second connecting area and the intermediate element C, on a contact bearing,
• wherein the positioning unit is configured to be used in a microlithographic projection exposure installation.

A positioning unit, comprising:

• a first connecting area configured to connect to an optical element,
• a second connecting area configured to connect to an object in the vicinity of the optical element,
• at least two levers, whose respective load arm is connected via a hinged joint and via an intermediate element, which acts on this hinged joint, to the first connecting area, the intermediate element having a hinged-joint connection, configured to stiffen the intermediate element, between the at least two levers, whose stiffness is adjustable, and
• adjustment devices or actuators arranged on the respective force arms of the levers,
• wherein the respective lever bearings are connected to the second connecting area, and the positioning unit is configured to be used in a microlithographic projection exposure installation.