Inspection method based on captured image and inspection device
AssigneeShibaura Mechatronics Corporation
InventorsYoshinori Hayashi, Hiroshi Wakaba, Yoko Ono, Koichi Miyazono, Masao Kawamura, Hideki Mori
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AssigneeShibaura Mechatronics Corporation
InventorsYoshinori Hayashi, Hiroshi Wakaba, Yoko Ono, Koichi Miyazono, Masao Kawamura, Hideki Mori
Estimating the term…
A method of inspection and inspection apparatus able to use a captured image to more precisely inspect the state of film, defect parts, etc. at a surface of an object under inspection are provided. A method of inspection and inspection apparatus illuminating a surface of an object under inspection 10 by white light from an illumination unit LO while scanning the surface of the object under inspection 10 by an image capturing unit 100 to acquire a captured image and using the captured image to inspect a state of the surface of the object under inspection 10, which changes a state of polarization of light LR striking the image capturing unit 100 from an illuminated location of the object under inspection 10 and obtains a plurality of captured images based on light of different polarization states LR striking the image capturing unit 100.
A method of inspection illuminating a surface of an object under inspection by white light from an illumination unit while scanning a surface of said object under inspection by an image capturing unit to obtain a captured image and using said captured image as a basis to inspect the state of the surface of said object under inspection,
An inspection apparatus having:
Dependencies are inferred from the claim text.