Liquid crystal display device

A liquid crystal display device comprising:

• a TFT substrate;
• a counter substrate;
• and
• liquid crystal sandwiched between the TFT substrate and the counter substrate, wherein
• a plurality of color filters are arranged on the counter substrate, and spacers are formed by stacking the plurality of color filters and by covering a surface of stacked color filters with an overcoat layer,
• pedestals are formed on the TFT substrate in a state where the pedestal faces the spacer in an opposed manner,
• the pedestal is formed by stacking at least a semiconductor layer and a metal layer which are formed simultaneously with a thin film transistor on the TFT substrate, and
• a side surface of the semiconductor layer and a side surface of the metal layer are formed continuously and uniformly.

A manufacturing method of a liquid crystal display device which includes:

• a TFT substrate;
• a counter substrate;
• and liquid crystal sandwiched between the TFT substrate and the counter substrate, wherein a plurality of color filters are arranged on the counter substrate, and spacers are formed by stacking the plurality of color filters and by covering a surface of stacked color filters with an overcoat layer, pedestals are formed on the TFT substrate in a state where the pedestal faces the spacer in an opposed manner, and the pedestal is formed by stacking at least a semiconductor layer and a metal layer which are formed simultaneously with a thin film transistor on the TFT substrate, the manufacturing method comprising the steps of:
• exposing a resist applied to a surface of the metal layer by coating using a mask pattern which decides a size of a pedestal portion constituted of the metal layer in forming the pedestal;
• etching the metal layer by dry etching using a pattern of the resist;
• and
• etching the semiconductor layer by dry etching using the pattern of the resist thereafter.