Methods and apparatus of manufacturing micro and nano-scale features

Abstract

The present invention provides methods of generating scalable micro to nano patterned features on a substrate. The methods include ejecting a succession of droplets; applying a force to the droplets in a manner such that the droplets travel along a designated path; altering the properties of droplets in a manner so as to adjust the size of the droplets from micrometer to nanometer; and depositing droplets on the substrate to generate patterned features on the substrate. Another aspect of the present invention provides an apparatus for generating scalable patterned features on a substrate. The apparatus includes a means for droplet forming and ejecting a succession of droplets; a means for altering the properties of droplets in a manner so as to adjust the size of the droplets from micrometer to nanometer; and one or more stream deflectors to control the direction of the droplets to generate patterned features on the substrate.

Dependencies are inferred from the claim text.