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US 2010/0245487 A1Published application
Liquid Ejecting Head, Liquid Ejecting Apparatus, and Actuator
AssigneeSeiko Epson Corporation
InventorKoji SUMI
Life of this patent
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Abstract
A liquid ejecting head is equipped with a piezoelectric element. The piezoelectric element has a piezoelectric layer containing titanium (Ti) and, zirconium (Zr) and first and second electrodes provided on both faces of the piezoelectric layer. The composition ratio of Ti and Zr in the piezoelectric layer Ti/(Zr+Ti) is in the range of 0.50 to 0.60 both inclusive. The piezoelectric layer contains rhombohedral crystals at least in a portion thereof covering the first electrode.
Claims7
A liquid ejecting head comprising:
- a channel-forming substrate having a pressure chamber communicating with a nozzle for ejecting a droplet;
- and
- a piezoelectric element provided on the channel-forming substrate to change a pressure in the pressure chamber, wherein:
- the piezoelectric element has a piezoelectric layer containing titanium (Ti) and zirconium (Zr), a first provided on one side face of the piezoelectric layer and a second electrode provided on the opposite side face of the piezoelectric layer;
- the composition ratio of Ti and Zr in the piezoelectric layer Ti/(Zr+Ti) is in the range of 0.50 to 0.60 both inclusive;
- and
- the piezoelectric layer contains a rhombohedral crystal at least in a portion thereof covering the first electrode.
4 more elements
An actuator comprising:
- a piezoelectric element having a piezoelectric layer containing titanium (Ti) and zirconium (Zr), first electrode provided on one face side of the piezoelectric layer and second electrode provided on the opposite side face of the piezoelectric layer, wherein:
- the composition ratio of Ti and Zr in the piezoelectric layer Ti/(Zr+Ti) is in the range of 0.50 to 0.60 both inclusive;
- and
- the piezoelectric layer contains a rhombohedral crystal at least in a portion thereof covering the first electrode.
1 more element
Dependencies are inferred from the claim text.