US 2010/0245475 A1 · INKJET PRINT HEAD AND METHOD THEREFOR

Abstract

An inkjet print head is fabricated by, fist, forming an electrode and two layers of a protection film composed of an inorganic insulating film and an organic insulating film over the electrode within a groove of a piezoelectric member, adhering a top board to the piezoelectric member covering the groove to form a pressure chamber, adhering a polyimide plate so as to cover the groove, and then forming a nozzle in the polyimide plate by the excimer laser processing aligning to the pressure chamber. Herein, the excimer laser light penetrates the polyimide plate to form a nozzle, and further proceeds to be emitted on the organic insulating film. Consequently, the part of the organic insulating film irradiated by the laser light is damaged. To prevent the damage of the organic insulating film, the thickness of the inorganic insulating film in the part to which the excimer laser light is emitted is prepared to be 0.5 μm or more.

Claims15

Dependent claims

An inkjet print head having a nozzle plate in which a plurality of nozzles from which ink is ejected are formed, a plurality of grooves each composing a pressure chamber communicating with a respective nozzle, pressure generating parts each causing ink within the respective pressure chamber to be ejected from the associated nozzle, a top board covering the grooves so as to form the individual pressure chambers, an ink supplying port supplying ink to the pressure chambers, and electrodes formed on the internal surfaces of the respective pressure chambers of the pressure generating parts for supplying a drive pulse to the respective pressure generating parts, the inkjet print head comprising:

a first protecting film composed of an inorganic insulating material formed on the electrode;
and
a second protecting film composed of an organic insulating material formed on the first protecting film, the second protecting film having a hole formed in the proximity of the nozzle,
wherein a thickness of the first protecting film in a position where the hole is formed is 0.5 μm or more.

1 more element

A method of manufacturing an inkjet print head having a nozzle plate in which a plurality of nozzles from which ink is ejected are formed, a plurality of grooves each composing a pressure chamber communicating with a respective nozzle, pressure generating parts each causing ink within the respective pressure chamber to be ejected from the associated nozzle, a top board covering the grooves so as to form the individual pressure chambers, an ink supplying port supplying ink to the pressure chambers, and electrodes formed on the internal surfaces of the respective pressure chambers of the pressure generating parts each for supplying a drive pulse to the pressure generating part, the method comprising the steps of, and the steps being performed in the order as arranged herein:

providing a substrate including a piezoelectric member in which the plurality of grooves each composing the pressure chamber and the pressure generating parts are formed;
forming the electrode on an internal surface of the groove;
forming a first protecting film composed of an inorganic insulating material on the electrode;
Adhering the top board to the substrate to form the pressure chambers;
providing a plate for forming the nozzles therein, the plate being adhered to the substrate;
forming a second protecting film composed of an organic insulating material on the first protecting film, and
forming the nozzles on the plate by laser beam machining,
wherein in the step of forming the nozzles on the plate by laser beam machining a thickness of the first protecting film in part which is irradiated with laser light after penetration of the laser light through the nozzle plate is 0.5 μm or more.

5 more elements

Dependencies are inferred from the claim text.

Inkjet print head and method therefor

Life of this patent

Inkjet print head and method therefor

Life of this patent

Abstract

Claims15