Waveguide of multi-layer metal structure and manufacturing method thereof
AssigneesSamsung Electronics Co., Ltd., Seoul National University Industry Foundation
InventorsDong-hyun Lee, Young-hwan Kim, Sung-tae Choi, Jung-han Choi, Cheol-gyu Hwang, Young-woo Kwon, Woo-yeol Choi
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Abstract
A waveguide of a multi-layer metal structure and a manufacturing method thereof are provided, the method including applying a plurality of metal layers on a substrate and a plurality of insulating layers respectively between the respective metal layers. Accordingly, it is possible to minimize conductive loss by dispersing current uniformly through wide regions between a signal line and ground lines.
Claims20
A waveguide of a multi-layer metal structure in which a plurality of metal layers are stacked on a substrate and a plurality of insulating layers are respectively formed between the plurality of metal layers, the waveguide comprising:
- at least one ground line;
- and
- a plurality of signal lines including a first signal unit on at least one of the plurality of metal layers and separated from the at least one ground line, and a second signal unit that has a width wider than a width of the first signal unit, is separated from the at least one ground line, and is situated at a height which is different from a height at which the first signal unit is situated.
A method for forming a waveguide in a multi-layer metal structure, the method comprising:
- forming a first signal unit and at least one ground line separated from the first signal unit on at least one metal layer of the multi-layer metal structure;
- and
- forming a second signal unit at a height which is different from a height at which the first signal unit is situated, wherein the second signal unit has a width wider than a width of the first signal unit, is separated from the at least one ground line.
A multi-layer metal structure comprising:
- a substrate;
- a plurality of metal layers stacked on the substrate;
- a plurality of insulating layers respectively formed between the plurality of metal layers;
- and
- a waveguide comprising:
- at least one ground line;
- and
- a plurality of signal lines including a first signal unit on at least one of the plurality of metal layers and separated from the at least one ground line, and a second signal unit that has a wider width than a width of the first signal unit, is separated from the at least one ground line, and is situated at a height which is different from a height at which the first signal unit is situated.
Dependencies are inferred from the claim text.