Composite substrate, elastic wave device using the same, and method for manufacturing composite substrate
AssigneeNGK Insulators, Ltd.
InventorsHiroki Kobayashi, Yuji Hori, Yasunori Iwasaki
Life of this patent
Estimating the term…
Loading patent…
AssigneeNGK Insulators, Ltd.
InventorsHiroki Kobayashi, Yuji Hori, Yasunori Iwasaki
Estimating the term…
In a composite substrate 10, the piezoelectric substrate 12 which is capable of transmitting an elastic wave and a support substrate 14 which a smaller thermal expansion coefficient than the piezoelectric substrate 12 are bonded to each other. The in-plane maximum thermal strain amount which is the largest thermal strain amount in the plane of the composite substrate 10 has a minimum value and a maximum value when the piezoelectric substrate 12 and the support substrate 14 are relatively rotated 0° to 360°, and the piezoelectric substrate 12 and the support substrate 14 are bonded to each other so that the in-plane maximum thermal strain amount has the minimum value or a value in the vicinity thereof.
A composite substrate comprising:
A composite substrate comprising:
A manufacturing method of a composite substrate comprising the step of bonding a piezoelectric substrate which has an anisotropy and which is capable of transmitting an elastic wave to a support substrate which has an anisotropy and a smaller thermal expansion coefficient than that of the piezoelectric substrate,
Dependencies are inferred from the claim text.