Mounting table structure and plasma film forming apparatus
AssigneeTokyo Electron Limited
InventorsToshiaki Fujisato, Ronald Nasman
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Abstract
A mounting table structure for mounting thereon an object to be processed to form a metal-containing thin film on the object includes a ceramic mounting table in which a chuck electrode and a heater are embedded, and a metal flange connected to a bottom surface of a peripheral portion of the mounting table. The mounting table structure further includes a metal base which is joined to the flange by screws and has a coolant path for flowing a coolant therein, and a metal seal member interposed between the flange and the base.
Claims15
A mounting table structure for mounting thereon an object to be processed to form a metal-containing thin film on the object, comprising:
- a ceramic mounting table in which a chuck electrode and a heater are embedded;
- a metal flange connected to a bottom surface of a peripheral portion of the mounting table;
- a metal base which is joined to the flange by screws and has a coolant path for flowing a coolant therein;
- and
- a metal seal member interposed between the flange and the base.
Dependencies are inferred from the claim text.