Solid-state imaging device and method for manufacturing same
AssigneeKabushiki Kaisha Toshiba
InventorYusaku KONNO
Life of this patent
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Abstract
A solid-state imaging device includes: a substrate including a plurality of light receiving sections; an optical waveguide provided above each of the plurality of light receiving sections and surrounded by a cladding layer; a color filter provided above each of the optical waveguides; and a lens provided above the color filter, the optical waveguide including a first layer having a first refractive index and a second layer being in contact with the first layer and having a second refractive index higher than the first refractive index.
Claims15
A solid-state imaging device comprising:
- a substrate including a plurality of light receiving sections;
- an optical waveguide provided above each of the plurality of light receiving sections and surrounded by a cladding layer;
- a color filter provided above each of the optical waveguides;
- and
- a lens provided above the color filter,
- the optical waveguide including a first layer having a first refractive index and a second layer being in contact with the first layer and having a second refractive index higher than the first refractive index.
A method for manufacturing a solid-state imaging device including:
- a substrate including a plurality of light receiving sections;
- an optical waveguide provided above each of the plurality of light receiving sections and surrounded by a cladding layer;
- a color filter provided above each of the optical waveguides;
- and
- a lens provided above each of the color filters,
- the optical waveguide including a first layer having a first refractive index and a second layer being in contact with the first layer and having a second refractive index higher than the first refractive index,
- the method comprising:
- forming the second layer under a reduced-pressure atmosphere;
- removing an upper portion of the second layer by performing etch-back on the upper portion of the second layer;
- and
- forming the first layer on the second layer.
Dependencies are inferred from the claim text.