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US 2010/0244164 A1Published application
Using pole pieces to guide magnetic flux through a mems device and method of making
AssigneeHoneywell International Inc.
InventorRyan Roehnelt
Life of this patent
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Abstract
Two opposing substrate layers each having one or more recesses filled with magnetic material guide the flow of flux through a coil in a MEMS device layer to provide for closed-loop operation. Flux flows from one pole piece through the coil to a second pole piece. A method of making using lithographic etching techniques is also provided.
Claims20
A method for providing magnetic flux in Micro-Electro Mechanical Systems (MEMS) device layer, the method comprising:
- receiving a substantial magnetic flux from a first magnetic material deposited in a first etched recess in a first substrate;
- guiding the magnetic flux through a coil included within the mems device layer, the mems device layer located between the first substrate and a return;
- and
- passing the magnetic flux to the return.
1 more element
A system comprising:
- a first substrate having a first etched recess, the first etched recess having a width;
- a Micro-Electro Mechanical Systems (MEMS) device layer including a coil, the coil having a width;
- and
- a return,
- wherein a first magnetic material is deposited in the first etched recess,
- wherein the mems device layer is located between the first substrate and the return.
3 more elements
A method comprising:
- packaging a Micro-Electro Mechanical Systems (MEMS) device layer between a first substrate and a second substrate, the mems device layer comprising a proof mass attached to a coil;
- etching a first recess in the first substrate;
- etching a second recess in the second substrate;
- depositing a magnetically conductive material in the first and the second recesses;
- attaching the first substrate to a magnet;
- and
- attaching the second substrate to a return.
4 more elements
Dependencies are inferred from the claim text.