Device of light-emitting diode and method for fabricating the same
AssigneeIndustrial Technology Research Institute
InventorsPo-Chun Liu, Chu-Li Chao, Yih-Der Guo
Life of this patent
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Abstract
A device of a light-emitting diode and a method for fabricating the same are provided. The LED device is made by forming a patterned epitaxial layer, a light-emitting structure, etc., on a substrate. In a subsequent process, the patterned epitaxial layer serves as a weakened structure, and can be automatically broken and a rough surface is thus formed. The weakened structure is formed with a specified height, and has pillar structures. The light-emitting structure is formed on the weakened structure. During a cooling process at room temperature, the weakened structure is automatically broken and a rough surface is thus formed.
Claims15
A method for fabricating a LED device, comprising:
- providing a substrate;
- forming a patterned epitaxial layer on the substrate, wherein the patterned epitaxial layer is formed by a plurality of pillar structures;
- forming a mask layer on a surface of the patterned epitaxial layer, wherein the mask layer at least covers a sidewall of the patterned epitaxial layer;
- forming a nitride epitaxial layer on the patterned epitaxial layer;
- forming a light-emitting structure layer on the nitride epitaxial layer to complete a first structure;
- providing a conductive carrier substrate, and performing a bonding process to transfer the first structure to the conductive carrier substrate;
- and
- performing a weakening process with a cooling process, so as to break the patterned epitaxial layer.
A LED device, comprising:
- a conductive carrier substrate;
- a light-emitting structure, located on the conductive carrier substrate;
- a plurality of pillar structures, located on the light-emitting structure;
- a dielectric layer, covering a sidewall of the pillar structure;
- a first electrode, located on the pillar structure;
- and
- a second electrode, located on the conductive carrier.
Dependencies are inferred from the claim text.