Mems device and process
AssigneeWolfson Microelectronics plc
InventorsRichard Ian Laming, Colin Robert Jenkins
Life of this patent
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Abstract
A MEMS transducer comprises a substrate (124). A membrane layer (120) is supported by the substrate (124). A back-plate layer (110) is supported by the membrane layer (120), said back-plate layer comprising a respective sidewall portion and a respective raised portion. One or more columns (116) are provided separate from the sidewall portion of the back-plate layer, said columns (116) connecting the back-plate layer, the membrane layer and the substrate.
Claims21
A MEMS transducer, comprising:
- a substrate;
- a membrane layer, supported by the substrate;
- a back-plate layer, supported by the membrane layer, said back-plate layer comprising a respective sidewall portion and a respective raised portion;
- and
- one or more columns separate from the sidewall portion of the back-plate layer, said columns connecting the back-plate layer, the membrane layer and the substrate.
(canceled)
A method for manufacturing a MEMS device, said MEMS device comprising a substrate, a membrane layer supported by the substrate, and a back-plate layer supported by the membrane layer, said method comprising:
- depositing a sacrificial layer on the substrate;
- removing the sacrificial layer from one or more selected positions, said selected positions defining the positions of one or more columns;
- and
- depositing the back-plate layer over the substrate.
(canceled)
Dependencies are inferred from the claim text.