Device and method for crystal orientation measurement by means of an ion blocking pattern and a focused ion probe

A crystal orientation measurement device comprising:

• an ion source (42);
• an ion focusing device for focusing of ions emitted from said ion source in an ion probe;
• a specimen support (18) for supporting a crystalline or polycrystalline specimen;
• and
• an imaging ion detector (12) for the acquisition of at least one ion blocking pattern (26) in digital form, said imaging ion detector comprising a first microchannel plate (28a), a transparent phosphor screen (30) and a multi-array sensor (32);
• wherein said crystal orientation measurement device is constructed to direct said ion probe successively on a great number of selected locations on said specimen and in doing so said ion blocking pattern is acquired in digital form on each of the selected locations by means of said imaging ion detector.

A method for crystal orientation measurement, said method comprising the steps of:

• a) focusing of ions emitted from an ion source in an ion probe;
• b) directing said ion probe at a crystalline or polycrystalline specimen supported by a specimen support;
• and
• c) recording at least one ion blocking pattern in digital form by an imaging ion detector.