Fluorine-Containing Cyclic Compound, Fluorine-Containing Polymer Compound, Resist Material Using Same and Method for Forming Pattern
AssigneeCentral Glass Company, Limited
InventorsHaruhiko Komoriya, Shinichi Sumida, Michitaka Ootani, Takeo Komata, Kazuhiko Maeda
Life of this patent
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Abstract
The present invention relates to, for example, a fluorine-containing cyclic compound represented by the following general formula (1). In the general formula (1), R1a is a C1-C25 cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group; each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group; and each of R1a, R2 and R3 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.
Claims12
A fluorine-containing cyclic compound represented by the following general formula (1):
- in the general formula (1), R1a is a C1-C25 cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group;
- each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group;
- and each of R1a, R2 and R3 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.
A fluorine-containing cyclic compound represented by the following general formula (2):
- in the general formula (2), R1a is a C1-C25 cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group;
- each of R2 to R4 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group;
- and each of R1a and R2 to R4 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.
A fluorine-containing cyclic compound represented by the following general formula (4):
- in the general formula (4), each of R2, R3 and R9 to R15 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, or nitrogen atom;
- R10 and R11 or R12 and R13 may be bonded together to form a ring;
- in such case, it is an C1-C25 alkylene group that may contain oxygen, sulfur, nitrogen or hetero atom;
- and “a” is 0 or 1, “b” is an integer of 0-2, and “c” is an integer of 0-2.
A fluorine-containing cyclic compound represented by the following general formula (5):
- in the general formula (5), each of R2 to R4 and R9 to R15 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, or nitrogen atom;
- R10 and R11 or R12 and R13 may be bonded together to form a ring;
- in such case, it is an C1-C25 alkylene group that may contain oxygen, sulfur, nitrogen or hetero atom;
- and “a” is 0 or 1, “b” is an integer of 0-2, and “c” is an integer of 0-2.
A fluorine-containing cyclic compound represented by the following general formula (7):
- in the general formula (7), each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, or nitrogen atom.
A fluorine-containing cyclic compound represented by the following general formula (8):
- in the general formula (8), each of R2 to R4 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, or nitrogen atom.
Dependencies are inferred from the claim text.