Surface acoustic wave element, method of producing the same, and method of changing resonation frequency of the same
AssigneeDenso Corporation
InventorsKazuki Arakawa, Kazuhiko Kano, Shingo Jinno
Life of this patent
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Abstract
A surface acoustic wave element includes a piezoelectric member, a comb-teeth electrode, and a reflector. The comb-teeth electrode is arranged on the piezoelectric member. The reflector is arranged on the piezoelectric member. The reflector reflects a surface acoustic wave transmitted from the comb-teeth electrode. The reflector has a plurality of areas, and each of the areas has a frequency to make a reflection efficiency the largest. At least two of the frequencies of the areas are made different from each other.
Claims10
A surface acoustic wave element comprising:
- a piezoelectric member;
- a comb-teeth electrode arranged on the piezoelectric member;
- and
- a reflector arranged on the piezoelectric member so as to reflect a surface acoustic wave transmitted from the comb-teeth electrode, wherein
- the reflector has a plurality of areas, each of the areas having a frequency to have a largest reflection efficiency, and
- at least two of the frequencies are different from each other.
A method of producing a surface acoustic wave element comprising:
- forming a comb-teeth electrode having a plurality of comb-teeth parts on a piezoelectric substrate;
- forming a reflector having a plurality of areas on the piezoelectric substrate, electrodes of the reflector being arranged in a direction of transmitting a surface acoustic wave from the comb-teeth electrode, an interval of the electrodes being different between at least two of the areas;
- and
- changing an electrically-conducted length of the comb-teeth part so as to correspond to the areas of the reflector.
A method of controlling a resonation frequency of a surface acoustic wave element comprising:
- forming a comb-teeth electrode on a piezoelectric substrate;
- forming a reflector having an open area and a short area on the piezoelectric substrate, electrodes of the reflector being arranged in a direction of transmitting a surface acoustic wave from the comb-teeth electrode, the electrodes being not shorted with each other in the open area, the electrodes being shorted with each other in the short area;
- and
- changing a ratio of the open area to the short area.
A method of controlling a resonation frequency of a surface acoustic wave element comprising:
- forming a comb-teeth electrode having a plurality of comb-teeth parts on a piezoelectric substrate;
- forming a reflector having a plurality of areas on the piezoelectric substrate, electrodes of the reflector being arranged in a direction of transmitting a surface acoustic wave from the comb-teeth electrode, an interval of the electrodes being different between at least two of the areas;
- and
- changing an electrically-conducted length of the comb-teeth part so as to correspond to the areas of the reflector.
Dependencies are inferred from the claim text.