Self-aligned coil process in magnetic recording heads

Abstract

In one embodiment of the present invention, a write head includes a first pole P1, a P1 pedestal, a first back gap layer plated on top of the first pole P1 leaving a region between the P1 pedestal and the first back gap layer for plating a coil, a first insulation layer applied on top of the P1 pedestal and the first back gap layer and the region between the P1 pedestal and the first back gap layer. The write head further includes a coil, patterned at least partially on top of the P1 pedestal and the first back gap layer and the region between the P1 pedestal and the first back gap layer, copper plated in the coil patterns, and a second insulation layer applied to fill the spaces in between the coil turns. The resulting structure is planarized via chemical mechanical polishing.

Dependencies are inferred from the claim text.