Back to results
US 2010/0173436 A1Published application
Method of making biomems devices
AssigneeDALSA Semiconductor Inc.
InventorsLuc Ouellet, Stephane Martel
Life of this patent
Estimating the term…
Abstract
A MEMS device is manufactured by first forming a self-aligned monolayer (SAM) on a carrier wafer. Next, a first polymer layer is formed on the self-aligned monolayer. The first polymer layer is patterned form a microchannel cover, which is then bonded to a patterned second polymer layer on a device wafer to form microchannels. The carrier wafer is then released from the first polymer layer.
Claims20
A method of making a MEMS device comprising:
- forming a self-aligned monolayer (SAM) on a carrier wafer;
- forming a first polymer layer on said self-assembled monolayer;
- patterning said first polymer layer to form a microchannel cover;
- bonding said microchannel cover to a patterned second polymer layer on a device wafer to form microchannels;
- and
- releasing said carrier wafer from the first polymer layer.
3 more elements
A carrier wafer for making a MEMS device, comprising a layer of patterned polymer formed on a self-aligned monolayer.
Dependencies are inferred from the claim text.