# US 2010/0168337 A1 · Graded topcoat materials for immersion lithography

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- Number: US 2010/0168337 A1
- Document ID: US20100168337A1
- Status: Published application
- Kind: A1
- Application number: 12/687,380
- Filed: 2010-01-14
- Published: 2010-07-01
- Earliest claimed: 2007-06-15
- Assignees: International Business Machines Corporation
- Inventors: Robert D. Allen; Phillip Brock; Daniel P. Sanders; Linda K. Sundberg
- Web page: https://patentgrep.com/patent/US20100168337A1

## CPC

- G03F 7/2041: {in the presence of a fluid, e.g. immersion; using fluid cooling means}
- G03F 7/11: having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)}
- Y10S 438/952: Utilizing antireflective layer
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A topcoat material for immersion lithography and a method of performing immersion lithography using the topcoat material. The topcoat material includes a mixture of a first polymer and a second polymer. The first and second polymers of the topcoat material, when the topcoat material is formed into a topcoat layer between an immersion fluid and a photoresist layer, disperse non-homogenously throughout the topcoat layer.

## Claims

### Claim 1

A composition, comprising:
a mixture of a first polymer and a second polymer, said first polymer containing fluorine, said second polymer miscible with said first polymer, said second polymer different from said first polymer, a weight percentage of fluorine in said first polymer greater than a weight percentage of fluorine in said second polymer;
a casting solvent;
said first polymer comprising one or more different monomers selected from the group consisting of:
wherein each Z1, Z2, and Z3 is independently selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycyclic heteroalkylenes, ester groups, carbonyl groups, carbonate groups, acetal groups, ketal groups, siloxyl groups, carboxylic acid groups, carboxylic acid anhydride groups, carboxylic acid anhydride half-ester groups, ether groups, amide groups, carbamate groups, thioether groups, fluorinated linear alkylenes, fluorinated branched alkylenes, fluorinated cyclic alkylenes, polycyclic alkylenes, fluorinated linear heteroalkylenes, fluorinated branched heteroalkylenes, fluorinated cyclic heteroalkylenes, fluorinated polycyclic heteroalkylenes, fluorinated ester groups, fluorinated carbonyl groups, fluorinated carbonate groups, fluorinated acetal groups, fluorinated ketal groups, fluorinated siloxyl groups, fluorinated carboxylic acid groups, fluorinated carboxylic acid anhydride groups, fluorinated carboxylic acid anhydride half-ester groups, fluorinated ether groups, fluorinated amide groups, fluorinated carbamate groups, and fluorinated thioether groups;
wherein R1 is selected from the group consisting of a fluoroalcohol group, a fluoroalcohol group protected with an acid-labile group, a fluoroalcohol group protected with a base-labile group, a fluoroalcohol group protected with an acid-labile fluorinated group, a fluoroalcohol group protected with a base-labile fluorinated group, and an —X1—Y1 group wherein X1 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, thioether groups, carbonate groups, carbamate groups, acetal groups, ketal groups and Y1 is selected from the group consisting of a fluoroalcohol group, a fluoroalcohol group protected with an acid-labile group, a fluoroalcohol group protected with a base-labile group, a fluoroalcohol group protected with an acid-labile fluorinated group, and a fluoroalcohol group protected with a base-labile fluorinated group;
wherein R2 is selected from the group consisting of hydrogen, fluorine, a fluoroalcohol group, a sulfonamide group, a phenolic group, a naphtholic group, a carboxylic acid group and a sulfonic acid group and an —X2—Y2 group wherein X2 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups amide groups, ether groups, thioether groups, carbonate groups, carbamate groups, acetal groups, ketal groups and Y2 is selected from the group consisting of a fluoroalcohol group, a sulfonamide group, a phenolic group, a naphtholic group, a carboxylic acid group and a sulfonic acid group;
wherein R3 is selected from the group consisting of hydrogen, fluorine, an acid-labile group, a base-labile group, an acid-labile fluorinated group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, fluorinated polycylic heteroalkanes and an —X3—Y3 group wherein X3 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, thioether groups, carbonate groups, carbamate groups, acetal groups, ketal groups and Y3 is selected from the group consisting of hydrogen, fluorine, an acid-labile group, a base-labile group, an acid-labile fluorinated group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, fluorinated polycylic heteroalkanes; and
said second polymer comprising one or more different monomers selected from the group consisting of:
wherein each Z4, Z5, and Z6 is independently selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycyclic heteroalkylenes, ester groups, carbonyl groups, carbonate groups, acetal groups, ketal groups, siloxyl groups, carboxylic acid groups, carboxylic acid anhydride groups, carboxylic acid anhydride half-ester groups, ether groups, amide groups, carbamate groups, thioether groups, fluorinated linear alkylenes, fluorinated branched alkylenes, fluorinated cyclic alkylenes, polycyclic alkylenes, fluorinated linear heteroalkylenes, fluorinated branched heteroalkylenes, fluorinated cyclic heteroalkylenes, fluorinated polycyclic heteroalkylenes, fluorinated ester groups, fluorinated carbonyl groups, fluorinated carbonate groups, fluorinated acetal groups, fluorinated ketal groups, fluorinated siloxyl groups, fluorinated carboxylic acid groups, fluorinated carboxylic acid anhydride groups, fluorinated carboxylic acid anhydride half-ester groups, fluorinated ether groups, fluorinated amide groups, fluorinated carbamate groups, and fluorinated thioether groups;
wherein R4 is selected from the group consisting of a sulfonic acid group, a sulfinic acid group, a carboxylic acid group and an —X4—Y4 group wherein X4 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, thioether groups, carbonate groups, carbamate groups, acetal groups, ketal groups and Y4 is selected from the group consisting of a sulfonic acid group, a sulfinic acid group, and a carboxylic acid group;
wherein R5 is selected from the group consisting of hydrogen, fluorine, a fluoroalcohol group, a sulfonamide group, a phenolic group, a naphtholic group, a carboxylic acid group and a sulfonic acid group and an —X5—Y5 group wherein X5 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, thioether groups, carbonate groups, carbamate groups, acetal groups, ketal groups and Y5 is selected from the group consisting of a fluoroalcohol group, a sulfonamide group, a phenolic group, a naphtholic group, a carboxylic acid group and a sulfonic acid group; and
wherein R6 is selected from the group consisting of hydrogen, fluorine, an acid-labile group, a base-labile group, an acid-labile fluorinated group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, fluorinated polycylic heteroalkanes and an —X6—Y6 group wherein X6 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, thioether groups, carbonate groups, carbamate groups, acetal groups, ketal groups and Y6 is selected from the group consisting of hydrogen, fluorine, an acid-labile group, a base-labile group, an acid-labile fluorinated group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, fluorinated polycylic heteroalkanes.

### Claim 2 (depends on 1)

The composition of claim 1, wherein said first polymer is selected from the group consisting of:
(a) a polymer comprising:
(b) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(c) a polymer comprising
(d) a polymer comprising:
(e) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(f) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(g) a polymer comprising:
(h) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(i) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(j) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(k) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(l) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100, and
(m) a polymer comprising W mer % of
and Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.

### Claim 3 (depends on 1)

The composition of claim 1, wherein said second polymer is selected from the group comprising:
(a) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(b) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9, Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(c) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(d) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(e) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(f) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(g) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(h) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(i) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(j) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100, and
(k) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.

### Claim 4 (depends on 1)

The composition of claim 1, wherein a receding water contact angle measurement of said mixture of said first and second polymers on a surface of a photoresist layer is greater than a weighted average of a receding water contact angle measurement of said first polymer on said surface of said photoresist layer and a receding water contact angle measurement of said second polymer on said surface of said photoresist layer, said weighted average weighted by relative amounts of said first and second polymers in said mixture.

### Claim 5

A composition, comprising:
a mixture of a first polymer and a second polymer, said first polymer containing a fluoro moiety, said second polymer miscible with said first polymer, said second polymer different from said first polymer, a weight percentage of fluorine in said first polymer greater than a weight percentage of fluorine in said second polymer;
a casting solvent;
said first polymer comprising one or more different monomers selected from the group consisting of:
wherein each Z1, Z2, and Z3 is independently selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycyclic heteroalkylenes, ester groups, carbonyl groups, carbonate groups, siloxyl groups, carboxylic acid anhydride groups, carboxylic acid anhydride half-ester groups, ether groups, amide groups, fluorinated linear alkylenes, fluorinated branched alkylenes, fluorinated cyclic alkylenes, polycyclic alkylenes, fluorinated linear heteroalkylenes, fluorinated branched heteroalkylenes, fluorinated cyclic heteroalkylenes, fluorinated polycyclic heteroalkylenes, fluorinated ester groups, fluorinated carbonyl groups, fluorinated carbonate groups, fluorinated siloxyl groups, fluorinated carboxylic acid anhydride groups, fluorinated carboxylic acid anhydride half-ester groups, fluorinated ether groups, and fluorinated amide groups;
wherein R1 is selected from the group consisting of a fluoroalcohol group and an —X1—Y1 group wherein X1 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, and carbonate groups, and Y1 is selected from the group consisting of a fluoroalcohol group;
wherein R2 is selected from the group consisting of hydrogen, fluorine, a fluoroalcohol group, a sulfonamide group, a naphtholic group, a carboxylic acid group, a sulfonic acid group, and an —X2—Y2 group wherein X2 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, and carbonate groups, and Y2 is selected from the group consisting of a fluoroalcohol group, a sulfonamide group, a phenolic group, a naphtholic group, a carboxylic acid group, and a sulfonic acid group;
wherein R3 is selected from the group consisting of hydrogen, fluorine, a base-labile group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, fluorinated polycylic heteroalkanes, and an —X3—Y3 group wherein X3 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, and carbonate groups and Y3 is selected from the group consisting of hydrogen, fluorine, a base-labile group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, and fluorinated polycylic heteroalkanes; and
said second polymer comprising one or more different monomers selected from the group consisting of:
wherein each Z4, Z5, and Z6 is independently selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycyclic heteroalkylenes, ester groups, carbonyl groups, carbonate groups, siloxyl groups, carboxylic acid groups, carboxylic acid anhydride groups, carboxylic acid anhydride half-ester groups, ether groups, amide groups, fluorinated linear alkylenes, fluorinated branched alkylenes, fluorinated cyclic alkylenes, polycyclic alkylenes, fluorinated linear heteroalkylenes, fluorinated branched heteroalkylenes, fluorinated cyclic heteroalkylenes, fluorinated polycyclic heteroalkylenes, fluorinated ester groups, fluorinated carbonyl groups, fluorinated carbonate groups, fluorinated siloxyl groups, fluorinated carboxylic acid groups, fluorinated carboxylic acid anhydride groups, fluorinated carboxylic acid anhydride half-ester groups, fluorinated ether groups, and fluorinated amide groups;
wherein R4 is selected from the group consisting of a sulfonic acid group, a carboxylic acid group, a fluorinated carboxylic acid group, and an —X4—Y4 group wherein X4 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, and carbonate groups, and Y4 is selected from the group consisting of a sulfonic acid group, a carboxylic acid group, and a fluorinated carboxylic acid group;
wherein R5 is selected from the group consisting of hydrogen, fluorine, a fluoroalcohol group, a sulfonamide group, a phenolic group, a naphtholic group, a carboxylic acid group, and a sulfonic acid group and an —X5—Y5 group wherein X5 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, and carbonate groups and Y5 is selected from the group consisting of a fluoroalcohol group, a sulfonamide group, a phenolic group, a naphtholic group, a carboxylic acid group, and a sulfonic acid group; and
wherein R6 is selected from the group consisting of hydrogen, fluorine, a base-labile group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, and fluorinated polycylic heteroalkanes, and an —X6—Y6 group wherein X6 is selected from the group consisting of linear alkylenes, branched alkylenes, cyclic alkylenes, polycyclic alkylenes, linear heteroalkylenes, branched heteroalkylenes, cyclic heteroalkylenes, polycylic heteroalkylenes, ester groups, carbonyl groups, amide groups, ether groups, and carbonate groups, and Y6 is selected from the group consisting of hydrogen, fluorine, a base-labile group, a base-labile fluorinated group, linear alkanes, branched alkanes, cyclic alkanes, polycyclic alkanes, linear heteroalkanes, branched heteroalkanes, cyclic heteroalkanes, polycylic heteroalkanes, fluorinated linear alkanes, fluorinated branched alkanes, fluorinated cyclic alkanes, fluorinated polycyclic alkanes, fluorinated linear heteroalkanes, fluorinated branched heteroalkanes, fluorinated cyclic heteroalkanes, and fluorinated polycylic heteroalkanes.

### Claim 6 (depends on 5)

The composition of claim 5, wherein said first polymer is selected from the group consisting of:
(a) a polymer comprising:
(b) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(c) a polymer comprising
(d) a polymer comprising:
(e) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(f) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(g) a polymer comprising:
(h) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(i) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(j) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(k) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(l) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100, and
(m) a polymer comprising W mer % of
and Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.

### Claim 7 (depends on 5)

The composition of claim 5, wherein said second polymer is selected from the group comprising:
(a) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(b) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9, Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(c) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(d) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(e) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(f) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(g) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(h) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(i) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100,
(j) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100, and
(k) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.

### Claim 8 (depends on 5)

The composition of claim 5, wherein a receding water contact angle measurement of said mixture of said first and second polymers on a surface of a photoresist layer is greater than a weighted average of a receding water contact angle measurement of said first polymer on said surface of said photoresist layer and a receding water contact angle measurement of said second polymer on said surface of said photoresist layer, said weighted average calculated using the relative amounts by weight of said first and second polymers in said mixture.

### Claim 9

A composition, comprising:
a mixture of a first methacrylate polymer and a second methacrylate polymer, said first polymer containing a fluoroalcohol group or a sulfonamide group, said second methacrylate polymer containing a fluorinated carboxylic acid group, a carboxylic acid group, or a sulfonic acid group, said second polymer miscible with said first polymer, said second polymer different from said first polymer; and
a casting solvent.

### Claim 10 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises repeat units having the structure:
and
wherein said second methacrylate polymer comprises:
W mer % of
Y mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 11 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises repeat units having the structure:
and
wherein said second methacrylate polymer comprises:
W mer % of
Y mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 12 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises:
A Mer % of
and B mer % of
wherein A=any number from 70 to 100 and B=any number from 0 to 30 such that A+B is greater than or equal to 90 and less than or equal to 100; and
wherein said second methacrylate polymer comprises:
W mer % of
Y mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 13 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises:
A mer % of
and B mer % of
and
wherein A=any number from 0 to 100 and B=any number from 0 to 100 such that A+B is greater than or equal to 90 and less than or equal to 100; and
wherein said second methacrylate polymer comprises:
W mer % of
Y mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 14 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises repeat units having the structure:
and
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 15 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises repeat units having the structure:
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 16 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises:
A Mer % of
and B mer % of
and
wherein A=any number from 70 to 100 and B=any number from 0 to 30 such that A+B is greater than or equal to 90 and less than or equal to 100; and
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 17 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises:
A mer % of
and B mer % of
wherein A=any number from 0 to 100 and B=any number from 0 to 100 such that A+B is greater than or equal to 90 and less than or equal to 100; and
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 18 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises repeat units having the structure:
and
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 19 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises repeat units having the structure:
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 20 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises:
A Mer % of
and B mer % of
and
wherein A=any number from 70 to 100 and B=any number from 0 to 30 such that A+B is greater than or equal to 90 and less than or equal to 100; and
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.

### Claim 21 (depends on 9)

The composition of claim 9,
wherein said first methacrylate polymer comprises:
A mer % of
and B mer % of
wherein A=any number from 0 to 100 and B=any number from 0 to 100 such that A+B is greater than or equal to 90 and less than or equal to 100; and
wherein said second methacrylate polymer comprises:
W mer % of
Y Mer % of
and Z mer % of
and
wherein W=any number from 10 to 99.9, Y=any number from 0.1 to 10, Z=any number from 0 to 89.9 such that W+Y+Z is greater than or equal to 90 and less than or equal to 100.