# US 2010/0167224 A1 · Drying furnace for cated film

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- Number: US 2010/0167224 A1
- Document ID: US20100167224A1
- Status: Published application
- Kind: A1
- Application number: 11/659,317
- Filed: 2005-08-22
- Published: 2010-07-01
- Earliest claimed: 2004-08-24
- Assignees: Kabushiki Kaisha Ishihyoki
- Inventors: Teruyuki Nakano; Yasuhiro Kozawa
- Web page: https://patentgrep.com/patent/US20100167224A1

## CPC

- H10P 72/0408: {for drying}
- F26B 9/06: in stationary drums or chambers
- F26B 25/004: {in the shape of discrete sheets (wicket conveyors F26B15/085)}
- H10P 72/0434: {mainly by convection}
- Y10S 414/135: Associated with semiconductor wafer handling
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- F26B: DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM (drying devices for combines A01D41/133; racks for drying fruit or vegetables A01F25/12; drying foodstuffs A23; drying hair A45D20/00; body-drying implements A47K10/00; drying household articles A47L; drying gases or vapours B01D; chemical or physical processes for dewatering or like separating liquids from solids B01D43/00; centrifugal apparatus B04; drying ceramics C04B33/30; drying yarns or fabrics in association with some other form of treatment D06C; drying frames for laundry without heating or positive air circulation, domestic laundry-or spin-driers, wringing or hot pressing laundry D06F; furnaces, kilns, ovens F27)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

In drying of a glass substrate to which a coated film is applied, the heating and drying is conducted while feeding means 10, 18, which always moves on a lower surface of the glass substrate 6 to which the coated film is applied, abuts against the substrate, in order to solve a problem that when the lower surface of the coated film is supported for a long time, supporting traces occur and thereby quality of the glass substrate is reduced. With this configuration, traces of the pin 11, 12, 21 are less likely to occur.

## Claims

### Claim 1

A drying furnace for a coated film heating up a substrate of which upper surface is provided with a coated film and drying the coated film, the drying furnace comprising:
a carrier port of the substrate which is formed on a side surface;
heating means which heats and dries the coated film of the substrate; and
feeding means which abuts against a lower surface of the substrate and moves an abutment position against the substrate during heating and drying of the coated film.

### Claim 2 (depends on 1)

The drying furnace for the coated film of claim 1, wherein the heating means is a pair of upper and lower hot plate heaters sandwiching the substrate.

### Claim 3

A drying furnace for a coated film heating up a substrate of which upper surface is provided with a coated film and drying the coated film, wherein
hot plate heaters are sequentially arranged in an order of hot plate heater, substrate and hot plate heater such that the substrate is sandwiched by the hot plate heaters, and
a carrier port of the substrate and feeding means are provided between upper and lower hot plate heaters, the feeding means abutting against a lower surface of a glass substrate and moving an abutment position against the substrate at heating and drying of the coated film.

### Claim 4 (depends on 1)

The drying furnace for the coated film of claim 1, wherein the feeding means is formed of a supporting pin which supports the lower surface of the substrate carried in from the carrier port; and a moving pin which moves vertically from a lower location to a higher location than the supporting pin by driving means and moves horizontally.

### Claim 5 (depends on 2)

The drying furnace for the coated film of claim 2, wherein the feeding means is formed of a supporting pin which supports the lower surface of the substrate carried in from the carrier port; and a moving pin which moves vertically from a lower location to a higher location than the supporting pin by driving means and moves horizontally.

### Claim 6 (depends on 3)

The drying furnace for the coated film of claim 3, wherein the feeding means is formed of a supporting pin which supports the lower surface of the substrate carried in from the carrier port; and a moving pin which moves vertically from a lower location to a higher location than the supporting pin by driving means and moves horizontally.

### Claim 7 (depends on 1)

The drying furnace for the coated film of claim 1, wherein the feeding means is formed of a plurality of rotators and pins radially protruding from the rotators and abutting against the lower surface of the substrate, and an interval of the pins is arranged such that the pins always abut against the lower surface of the substrate when the rotators rotate.

### Claim 8 (depends on 2)

The drying furnace for the coated film of claim 2, wherein the feeding means is formed of a plurality of rotators and pins radially protruding from the rotators and abutting against the lower surface of the substrate, and
an interval of the pins is arranged such that the pins always abut against the lower surface of the substrate when the rotators rotate.

### Claim 9 (depends on 3)

The drying furnace for the coated film of claim 3, wherein the feeding means is formed of a plurality of rotators and pins radially protruding from the rotators and abutting against the lower surface of the substrate, and
an interval of the pins is arranged such that the pins always abut against the lower surface of the substrate when the rotators rotate.