Microchannel chip

A micro-channel chip comprising, in order from top to bottom, a

• first substrate, a second substrate, and a third substrate bonded together, at least one patch of a non-adhesive thin-film layer for generating a fluid control element is formed on a mating surface of at least one substrate selected from between the first substrate and the second substrate,
• at least one patch of a non-adhesive thin-film layer for generating a micro-channel is formed on the mating surface of at least one substrate selected from between the second substrate and the third substrate,
• wherein the non-adhesive thin-film layer for generating a fluid control element is formed in such a way that it overlaps, with the second substrate being interposed, at least a part of the non-adhesive thin-film layer for generating a micro-channel, and the first substrate is provided with a first port and a second port,
• wherein the first port being deep enough to reach the second substrate for opening to the atmosphere and to which at least one end portion of the non-adhesive thin-film layer for generating a micro-channel is communicably connected, and
• wherein the second port being open to the atmosphere and to which at least one end portion of the non-adhesive thin-film layer for generating a fluid control element is communicably connected,
• wherein an underplate made of a material that is difficult to deform by itself is provided on the underside of the third substrate, the underplate has a first recess and a second recess provided at the interface with the third substrate,
• wherein the first recess extending from a position that is short of the center of the first port toward the non-adhesive thin-film layer for generating a micro-channel,
• wherein the second recess extending from a position in that part of the non-adhesive thin-film layer for generating a fluid control element which does not overlap the non-adhesive thin-film layer for generating a micro-channel and that is short of the center of the second port toward the non-adhesive thin-film layer for generating a fluid control element in that part which does not overlap the non-adhesive thin-film layer for generating a micro-channel,
• wherein a width of the first recess being greater than that of the non-adhesive thin-film layer for generating a micro-channel, as well as a width of the non-adhesive thin-film layer for generating a fluid control element in the part which overlaps the non-adhesive thin-film layer for generating a micro-channel.

A micro-channel chip comprising, in order from top to bottom, a

• first substrate, a second substrate, and a third substrate bonded together,
• at least one patch of a non-adhesive thin-film layer for generating a micro-channel is formed on a mating surface of at least one substrate selected from between the first substrate and the second substrate,
• at least one patch of a non-adhesive thin-film layer for generating a fluid control element is formed on the mating surface of at least one substrate selected from between the second substrate and the third substrate, the non-adhesive thin-film layer for generating a fluid control element is formed in such a way that it overlaps, with the second substrate being interposed, at least a part of the non-adhesive thin-film layer for generating a micro-channel,
• wherein the first substrate is provided with a first port and a second port, the first port being open to the atmosphere and to which at least one end portion of the non-adhesive thin-film layer for generating a micro-channel is communicably connected, and
• wherein the second port being deep enough to reach the second substrate for opening to the atmosphere and to which at least one end portion of the non-adhesive thin-film layer for generating a fluid control element is communicably connected,
• an underplate made of a material that is difficult to deform by itself is provided on the underside of the third substrate, the underplate has a first recess and a second recess provided at the interface with the third substrate,
• wherein the first recess extending from a position that is short of the center of the first port toward the non-adhesive thin-film layer for generating a micro-channel,
• wherein the second recess extending from a position in that part of the non-adhesive thin-film layer for generating a fluid control element which does not overlap the non-adhesive thin-film layer for generating a micro-channel and that is short of the center of the second port toward the non-adhesive thin-film layer for generating a fluid control element in the part which does not overlap the non-adhesive thin-film layer for generating a micro-channel,
• wherein a width of the first recess being greater than that of the non-adhesive thin-film layer for generating a micro-channel but smaller than the width of the non-adhesive thin-film layer for generating a fluid control element in the part which overlaps the non-adhesive thin-film layer for generating a micro-channel.

A micro-channel chip comprising, in order from top to bottom, a first substrate, a second substrate, a third substrate, and a fourth substrate bonded together,

• at least one patch of a first non-adhesive thin-film layer for generating a fluid control element is formed on a mating surface of at least one substrate selected from between the first substrate and the second substrate,
• at least one patch of a non-adhesive thin-film layer for generating a micro-channel is formed on a mating surface of at least one substrate selected from between the second substrate and the third substrate, and
• at least one patch of a second non-adhesive thin-film layer for generating a fluid control element is formed on a mating surface of at least one substrate selected from between the third substrate and the fourth substrate, wherein the first non-adhesive thin-film layer for generating a fluid control element is formed in such a way that it overlaps, with the second substrate being interposed, at least a part of the non-adhesive thin-film layer for generating a micro-channel,
• wherein the second non-adhesive thin-film layer for generating a fluid control element is formed in such a way that it overlaps, with the third substrate being interposed, at least a part of the non-adhesive thin-film layer for generating a micro-channel, and
• wherein the first substrate is provided with a first port, a second port, and a third port,
• wherein the first port being deep enough to reach the second substrate for opening to the atmosphere and to which at least one end portion of the non-adhesive thin-film layer for generating a micro-channel is communicably connected,
• wherein the second port being open to the atmosphere and to which at least one end portion of the first non-adhesive thin-film layer for generating a fluid control element is communicably connected, and
• wherein the third port being deep enough to reach the third substrate for opening to the atmosphere and to which at least one end portion of the second non-adhesive thin-film layer for generating a fluid control element is communicably connected,
• an underplate made of a material that is difficult to deform by itself is provided on the underside of the fourth substrate, the underplate has a first recess, a second recess, and a third recess provided at the interface with the fourth substrate,
• wherein the first recess extending from a position that is short of the center of the first port toward the non-adhesive thin-film layer for generating a micro-channel,
• wherein the second recess extending from a position in that part of the first non-adhesive thin-film layer for generating a fluid control element which does not overlap the non-adhesive thin-film layer for generating a micro-channel and that is short of the center of the second port toward that part of the first non-adhesive thin-film layer for generating a fluid control element which does not overlap the non-adhesive thin-film layer for generating a micro-channel,
• wherein the third recess extending from a position in that part of the second non-adhesive thin-film layer for generating a fluid control element which does not overlap the non-adhesive thin-film layer for generating a micro-channel and that is short of the center of the third port toward the second non-adhesive thin-film layer for generating a fluid control element in that part which does not overlap the non-adhesive thin-film layer for generating a micro-channel,
• wherein a width of the first recess being greater than that of the non-adhesive thin-film layer for generating a micro-channel as well as the width of the first non-adhesive thin-film layer for generating a fluid control element in that part which overlaps the non-adhesive thin-film layer for generating a micro-channel but smaller than the width of the second non-adhesive thin-film layer for generating a fluid control element in that part which overlaps the non-adhesive thin-film layer for generating a micro-channel.