# US 2010/0165044 A1 · Inkjet prtinthead and method of manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2010/0165044 A1 - Document ID: US20100165044A1 - Status: Published application - Kind: A1 - Application number: 12/575,087 - Filed: 2009-10-07 - Published: 2010-07-01 - Earliest claimed: 2008-12-31 - Assignees: Samsung Electronics Co., Ltd. - Inventors: Sung-Joon PARK; Myong-Jong Kwon; Jin-Wook Lee; Young-Ung Ha - Web page: https://patentgrep.com/patent/US20100165044A1 ## CPC - B41J 2/14129: {Layer structure} - B41J 2/1603: {of the front shooter type} - B41J 2/1623: {bonding and adhesion} - B41J 2/1628: {dry etching} - B41J 2/1629: {wet etching} - B41J 2/1631: {photolithography} - B41J 2/1632: {machining} - B41J 2/1639: {sacrificial molding} - B41J 2/1645: {thin film formation by spincoating} - B41J 2/1646: {thin film formation by sputtering} - Y10T 29/49401: Fluid pattern dispersing device making, e.g., ink jet - B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes: a substrate including an ink feed hole; a chamber layer formed on the substrate and including a plurality of ink chambers in which ink supplied from the ink feed hole may be filled; and a nozzle layer formed on the chamber layer and including a plurality of nozzles through which ink may be ejected, wherein the chamber layer and the nozzle layer are respectively formed of cured products of a first negative photoresist composition and a second negative photoresist composition, wherein the first negative photoresist composition and the second negative photoresist composition include a bisphenol-A novolac epoxy resin represented by Formula 1; at least one epoxy resin selected from a first epoxy resin represented by Formula 2, and a second epoxy resin represented by Formula 3; a cationic photoinitiator; and a solvent. ## Claims ### Claim 1 An inkjet printhead, comprising: a substrate having an ink feed hole; a chamber layer formed on the substrate, wherein the chamber layer comprises a plurality of ink chambers in which ink supplied from the ink feed hole is filled; and a nozzle layer formed on the chamber layer, wherein the nozzle layer comprises a plurality of nozzles through which ink is ejected, wherein the chamber layer and the nozzle layer are formed of cured products of a first negative photoresist composition and a second negative photoresist composition, wherein the first negative photoresist composition and the second negative photoresist composition comprise a bisphenol-A novolac epoxy resin represented by Formula 1; at least one epoxy resin selected from a first epoxy resin represented by Formula 2; and a second epoxy resin represented by Formula 3; a cationic photoinitiator; and a solvent: wherein k, p, n and m are each independently an integer of 1 to 30; and wherein R1 through R24 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, an amino group, a nitro group, a cyano group, a substituted or unsubstituted C1-C20 alkyl group, a substituted or unsubstituted C1-C20 carboxyl group, a substituted or unsubstituted C1-C20 alkylsiloxane group, a substituted or unsubstituted C1-C20 alkoxy group, a substituted or unsubstituted C2-C20 alkenyl group, a substituted or unsubstituted C2-C20 alkynyl group, a substituted or unsubstituted C1-C20 heteroalkyl group, a substituted or unsubstituted C6-C30 aryl group, a substituted or unsubstituted C7-C30 arylalkyl group, a substituted or unsubstituted C5-C30 heteroaryl group, or a substituted or unsubstituted C3-C30 heteroarylalkyl group. ### Claim 2 (depends on 1) The inkjet printhead of claim 1, wherein the bisphenol-A novolac epoxy resin, the first epoxy resin, and the second epoxy resin are represented by Formula 4, 5, and 6, respectively: wherein k, p, n and m are each independently an integer of 1 to 30; and wherein R25 to R29 are each independently a hydrogen atom or a substituted or unsubstituted C1-C20 alkyl group. ### Claim 3 (depends on 1) The inkjet printhead of claim 1, wherein the cationic photoinitiator is an aromatic halonium salt or an aromatic sulfonium salt. ### Claim 4 (depends on 1) The inkjet printhead of claim 1, wherein the solvent is α-butyrolactone, γ-butyrolactone, propylene glycol methyl ethyl acetate, tetrahydrofuran, methyl ethyl ketone, methyl isobutyl ketone, cyclopentanone, xylene, or a combination thereof. ### Claim 5 (depends on 1) The inkjet printhead of claim 1, wherein the amount of the at least one epoxy resin selected from the first epoxy resin and the second epoxy resin may be from about 10 to about 1,900 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin; the amount of the cationic photoinitiator is from about 0.1 to about 200 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin; and the amount of solvent is from about 5 to about 2,000 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin. ### Claim 6 (depends on 1) The inkjet printhead of claim 1, further comprising: an insulating layer formed on the substrate; a plurality of heaters and electrodes sequentially formed on the insulating layer; and a passivation layer formed so as to cover the plurality of heaters and electrodes. ### Claim 7 (depends on 6) The inkjet printhead of claim 6, further comprising an anti-cavitation layer on the passivation layer. ### Claim 8 (depends on 1) The inkjet printhead of claim 1, further comprising a glue layer interposed between the substrate and the chamber layer. ### Claim 9 A method of manufacturing an inkjet printhead, comprising: forming a chamber layer on a substrate; forming an ink feed hole on the substrate; forming a nozzle layer comprising a plurality of nozzles on the chamber layer; and forming an ink chamber and a restrictor through the ink feed hole, wherein the chamber layer and the nozzle layer are respectively formed of cured products of a first negative photoresist composition and a second negative photoresist composition, wherein the first negative photoresist composition and the second negative photoresist composition comprise a bisphenol-A novolac epoxy resin represented by Formula 1; at least one epoxy resin selected from a first epoxy resin represented by Formula 2; and a second epoxy resin represented by Formula 3; a cationic photoinitiator; and a solvent: wherein k, p, n and m are each independently an integer of 1 to 30; and wherein R1 through R24 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, an amino group, a nitro group, a cyano group, a substituted or unsubstituted C1-C20 alkyl group, a substituted or unsubstituted C1-C20 carboxyl group, a substituted or unsubstituted C1-C20 alkylsiloxane group, a substituted or unsubstituted C1-C20 alkoxy group, a substituted or unsubstituted C2-C20 alkenyl group, a substituted or unsubstituted C2-C20 alkynyl group, a substituted or unsubstituted C1-C20 heteroalkyl group, a substituted or unsubstituted C6-C30 aryl group, a substituted or unsubstituted C7-C30 arylalkyl group, a substituted or unsubstituted C5-C30 heteroaryl group, or a substituted or unsubstituted C3-C30 heteroarylalkyl group. ### Claim 10 (depends on 9) The method of claim 9, wherein the bisphenol-A novolac epoxy resin, the first epoxy resin, and the second epoxy resin are represented by Formula 4, 5, and 6, respectively: wherein k, p, n and m are each independently an integer of 1 to 30; and wherein R25 to R29 are each independently a hydrogen atom or a substituted or unsubstituted C1-C20 alkyl group. ### Claim 11 (depends on 9) The method of claim 9, wherein the amount of the at least one epoxy resin selected from the first epoxy resin and the second epoxy resin may be from about 10 to about 1,900 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin; the amount of the cationic photoinitiator is from about 0.1 to about 200 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin; and the amount of solvent is from about 5 to about 2,000 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin. ### Claim 12 (depends on 9) The method of claim 9, further comprising: forming an insulating layer on the substrate; sequentially forming a plurality of heaters and electrodes on the insulating layer; and forming a passivation layer so as to cover the plurality of heaters and electrodes before forming the chamber layer on the substrate. ### Claim 13 (depends on 12) The method of claim 12, further comprising: forming an anti-cavitation layer on the passivation layer. ### Claim 14 A method of manufacturing an inkjet printhead, comprising: forming a chamber layer on a substrate; forming a nozzle layer comprising a plurality of nozzles on the chamber layer; forming an ink feed hole on the bottom surface of the substrate; and forming an ink chamber and a restrictor through the ink feed hole, wherein the chamber layer and the nozzle layer are formed of cured products of a first negative photoresist composition and a second negative photoresist composition, wherein the first negative photoresist composition and the second negative photoresist composition comprise a bisphenol-A novolac epoxy resin represented by Formula 1; at least one epoxy resin selected from a first epoxy resin represented by Formula 2; and a second epoxy resin represented by Formula 3; a cationic photoinitiator; and a solvent: wherein k, p, n and m are each independently an integer of 1 to 30; and wherein R1 through R24 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, an amino group, a nitro group, a cyano group, a substituted or unsubstituted C1-C20 alkyl group, a substituted or unsubstituted C1-C20 carboxyl group, a substituted or unsubstituted C1-C20 alkylsiloxane group, a substituted or unsubstituted C1-C20 alkoxy group, a substituted or unsubstituted C2-C20 alkenyl group, a substituted or unsubstituted C2-C20 alkynyl group, a substituted or unsubstituted C1-C20 heteroalkyl group, a substituted or unsubstituted C6-C30 aryl group, a substituted or unsubstituted C7-C30 arylalkyl group, a substituted or unsubstituted C5-C30 heteroaryl group, or a substituted or unsubstituted C3-C30 heteroarylalkyl group. ### Claim 15 (depends on 14) The method of claim 14, wherein the bisphenol-A novolac epoxy resin, the first epoxy resin, and the second epoxy resin are represented by Formula 4, 5, and 6, respectively: wherein k, p, n and m are each independently an integer of 1 to 30; and wherein R25 to R29 are each independently a hydrogen atom or a substituted or unsubstituted C1-C20 alkyl group. ### Claim 16 (depends on 14) The method of claim 14, wherein the amount of the at least one epoxy resin selected from the first epoxy resin and the second epoxy resin may be from about 10 to about 1,900 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin; the amount of the cationic photoinitiator is from about 0.1 to about 200 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin; and the amount of solvent is from about 5 to about 2,000 parts by weight based on about 100 parts of the bisphenol-A novolac epoxy resin. ### Claim 17 (depends on 14) The method of claim 14, further comprising: forming an insulating layer on the substrate; sequentially forming a plurality of heaters and electrodes on the insulating layer; and forming a passivation layer so as to cover the plurality of heaters and electrodes before forming the chamber layer on the substrate. ### Claim 18 (depends on 17) The method of claim 17, further comprising: forming an anti-cavitation layer on the passivation layer.