# US 2010/0164607 A1 · Semiconductor device that can adjust substrate voltage

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- Number: US 2010/0164607 A1
- Document ID: US20100164607A1
- Status: Published application
- Kind: A1
- Application number: 12/647,259
- Filed: 2009-12-24
- Published: 2010-07-01
- Earliest claimed: 2008-12-25
- Assignees: Elpida Memory, Inc.
- Inventors: Shinichi Miyatake; Seiji Narui; Hitoshi Tanaka
- Web page: https://patentgrep.com/patent/US20100164607A1

## CPC

- G05F 3/205: {Substrate bias-voltage generators (for static stores G11C5/146)}
- G05F 1/46: wherein the variable actually regulated by the final control device is DC (G05F1/625 takes precedence)
- G05F: SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES

## Abstract

To provide a semiconductor device including: a MOS transistor formed in a semiconductor substrate and have a threshold voltage to be adjusted, a replica transistor of the MOS transistor, a monitoring circuit monitors a gate/source voltage needed when the replica transistor flows a current having a given designed value, a negative voltage pumping circuit generates a substrate voltage of the MOS transistor, based on an output from the monitoring circuit, and a limiting circuit defines the operation of the negative voltage pumping circuit, regardless of a monitoring result of the monitoring circuit, in response to an excess of the substrate voltage with respect to a predetermined value.

## Claims

### Claim 1

A semiconductor device, comprising:
a first MOS transistor formed in a semiconductor substrate;
at least one replica transistor of the first MOS transistor;
a monitoring circuit that monitors a gate/source voltage of the replica transistor needed when the replica transistor flows a current having a given designed value;
a voltage generating circuit that generates a substrate voltage of the first MOS transistor based on an output from the monitoring circuit; and
a limiting circuit that defines an operation of the voltage generating circuit, regardless of a monitoring result of the monitoring circuit, in response to an excess of the substrate voltage with respect to a predetermined value.

### Claim 2 (depends on 1)

The semiconductor device as claimed in claim 1, wherein the limiting circuit activates the voltage generating circuit regardless of the monitoring result of the monitoring circuit when a level of the substrate voltage is higher than a first level.

### Claim 3 (depends on 1)

The semiconductor device as claimed in claim 1, wherein the limiting circuit inactivates the voltage generating circuit regardless of the monitoring result of the monitoring circuit when a level of the substrate voltage is lower than a second level.

### Claim 4 (depends on 1)

The semiconductor device as claimed in claim 1, wherein the monitoring circuit includes:
a constant current circuit that supplies the current having the given designed value to the replica transistor; and
an operational amplifier that constantly maintains the source/drain voltage of the replica transistor.

### Claim 5 (depends on 4)

The semiconductor device as claimed in claim 4, wherein the given designed value is a designed value of a drain current of the first MOS transistor when the first MOS transistor is turned off.

### Claim 6 (depends on 4)

The semiconductor device as claimed in claim 4, wherein the given designed value is a designed value of a drain current of the first MOS transistor when the first MOS transistor is turned on.

### Claim 7 (depends on 1)

The semiconductor device as claimed in claim 1, wherein a plurality of replica transistors are provided, the monitoring circuit monitors an average of gate/source voltages needed when each of the plurality of replica transistors flows the current having the given designed value.

### Claim 8 (depends on 1)

The semiconductor device as claimed in claim 1, further comprising a second MOS transistor formed in the semiconductor substrate and supplied with a voltage generated by the voltage generating circuit to a substrate thereof,
wherein the first and second MOS transistors are included in different circuits from each other that are formed in different circuit blocks and have different functions.

### Claim 9 (depends on 8)

The semiconductor device as claimed in claim 8, wherein the first and second MOS transistors are formed in a same well formed in the semiconductor substrate, and the voltage generated by the voltage generating circuit is supplied to the well.

### Claim 10 (depends on 8)

The semiconductor device as claimed in claim 8, wherein the first MOS transistor is a transistor included in a sense amplifier, the second MOS transistor is a transistor included in a memory cell, and the sense amplifier and the memory cell are connected through a bit line.

### Claim 11

A semiconductor device comprising:
a first region supplied with a substrate bias voltage;
a first transistor formed in the first region, and including a first gate electrode and first source and drain regions;
a monitor circuit monitoring a level of the substrate bias voltage;
a voltage generating circuit generating the substrate bias voltage; and
a control circuit controlling the voltage generating circuit in response to an output of the monitor circuit and a gate voltage of the first gate electrode of the first transistor.

### Claim 12 (depends on 11)

The semiconductor device as claimed in claim 11, further comprising:
a current source coupled to the first drain region; and
an additional control circuit supplied with a reference voltage,
wherein the additional control circuit controls the gate voltage of the first gate electrode so that a voltage between the first source and drain regions is equalized to the reference voltage.

### Claim 13 (depends on 12)

The semiconductor device as claimed in claim 12, further comprising:
a second region supplied with the substrate bias voltage; and
a second transistor formed in the second region,
wherein the second transistor includes a second gate electrode and second source and drain regions, and a voltage between the second source and drain regions rendered to be non-conductive is substantially equal to the reference voltage.

### Claim 14 (depends on 13)

The semiconductor device as claimed in claim 13, further comprising a third transistor formed in the second region, wherein the second transistor includes a part of sense amplifier, and the third transistor includes a memory cell transistor.
