# US 2010/0163545 A1 · Fully integrated temperature regulator for biochemical applications > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2010/0163545 A1 - Document ID: US20100163545A1 - Status: Published application - Kind: A1 - Application number: 12/399,320 - Filed: 2009-03-06 - Published: 2010-07-01 - Earliest claimed: 2008-03-07 - Assignees: California Institute of Technology - Inventors: Hua Wang; Seyed Ali Hajimiri - Web page: https://patentgrep.com/patent/US20100163545A1 ## CPC - G05D 23/24: the sensing element having a resistance varying with temperature, e.g. a thermistor - G05D 23/1906: {using an analogue comparing device} - G05D 23/22: the sensing element being a thermocouple - G05D 23/27: with sensing element responsive to radiation - G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES ## Abstract The invention is an integrated temperature regulator that can be fabricated using conventional semiconductor processing technology. The integrated temperature regulator can include a reaction chamber, for example fabricated from PDMS, in which chemical or biochemical reactions of interest can be carried out. The temperature regular can also be used to regulate the temperature of some circuits, e.g. an effective-inductance-change based magnetic particle sensor, to achieve a stable operation performance, such as an improved sensitivity. The integrated temperature regulator includes as subcomponents a temperature sensing circuit that receives a thermal signal from the vicinity of the reaction chamber, a temperature reference circuit, and a temperature control circuit that controls a heater based at least in part on the difference between the sensed temperature and the reference temperature. The various subcomponents can be programmable. ## Claims ### Claim 1 An integrated temperature regulator, comprising: a substrate having a surface; a temperature sensing circuit constructed on said surface, said temperature sensing circuit configured to sense a temperature in the vicinity of said substrate and to generate a temperature signal representative of said temperature; a temperature reference circuit constructed on said surface, said temperature reference circuit configured to generate a temperature-independent reference signal; a temperature control circuit constructed on said surface, said temperature control circuit in electrical communication with said temperature sensing circuit and said temperature reference circuit, said temperature control circuit configured to calculate and amplify a temperature difference between said temperature-independent reference signal and said temperature signal, and configured to provide as output a heater drive signal based at least in part on said calculated difference; and an electrical-thermal feedback loop comprising a heater and a reaction chamber, said electrical-thermal feedback loop configured to provide a thermal signal from said heater and said reaction chamber to said temperature sensing circuit, said heater and said reaction chamber configured to provide a thermal environment and a reaction environment, respectively, for a chemical or a biochemical reaction of interest. ### Claim 2 (depends on 1) The integrated temperature regulator of claim 1, wherein said substrate is a semiconductor wafer. ### Claim 3 (depends on 1) The integrated temperature regulator of claim 1, wherein at least one of said temperature sensing circuit, said temperature reference circuit, said temperature control circuit, and said heater comprise a structure that is configured to be constructed using conventional silicon semiconductor processing technology. ### Claim 4 (depends on 1) The integrated temperature regulator of claim 1, wherein said temperature sensing circuit is configured to provide a signal that is a monotonic function with respect to a sensed temperature. ### Claim 5 (depends on 1) The integrated temperature regulator of claim 1, wherein said temperature sensing circuit comprises a proportional-to-absolute-temperature (PTAT) circuit. ### Claim 6 (depends on 1) The integrated temperature regulator of claim 1, wherein said temperature sensing circuit is configured to provide a temperature signal having a programmable relation to said temperature that is sensed. ### Claim 7 (depends on 1) The integrated temperature regulator of claim 1, wherein said temperature reference circuit is configured to receive an input signal provided by a temperature controlled source that does not vary as a temperature of said heater varies. ### Claim 8 (depends on 1) The integrated temperature regulator of claim 1, wherein said temperature reference circuit is configured to provide a temperature reference signal that is programmable. ### Claim 9 (depends on 1) The integrated temperature regulator of claim 1, wherein said temperature control circuit is configured to provide a control signal to maintain a temperature at a desired value different from ambient temperature when said calculated temperature difference between said temperature-independent reference signal and said temperature signal is substantially zero. ### Claim 10 (depends on 1) The integrated temperature regulator of claim 1, wherein said temperature control circuit is configured to provide a heater drive signal that is programmable. ### Claim 11 (depends on 1) The integrated temperature regulator of claim 1, wherein said heater is configured to circumscribe said temperature sensing circuit, said temperature reference circuit, and said temperature control circuit when viewed in a direction substantially normal to said surface of said substrate. ### Claim 12 (depends on 1) The integrated temperature regulator of claim 1, wherein said heater is a resistance heater. ### Claim 13 (depends on 1) The integrated temperature regulator of claim 1, wherein said heater is configured to have a desired shape and a desired dimension. ### Claim 14 (depends on 1) The integrated temperature regulator of claim 1, wherein said reaction chamber comprises PDMS. ### Claim 15 (depends on 1) The integrated temperature regulator of claim 1, further comprising electrical terminals configured to accept as input electrical power and command signals useful to operate each of said temperature sensing circuit, said temperature reference circuit, said temperature control circuit, and said heater, and to provide output signals representative of one or more operating parameters of said integrated temperature regulator. ### Claim 16 (depends on 1) The integrated temperature regulator of claim 1, wherein said electrical-thermal feedback loop is configured to have negative feedback. ### Claim 17 (depends on 16) The integrated temperature regulator of claim 16, wherein said electrical-thermal feedback loop having negative feedback further comprises an integration element configured to provide zero temperature regulating offset when an ambient temperature is changed or is different from a desired temperature. ### Claim 18 (depends on 1) The integrated temperature regulator of claim 1, further comprising a thermal isolation region around said substrate. ### Claim 19 (depends on 1) An array comprising a plurality of ones of said integrated temperature regulator of claim 1, said array situated on said surface of said substrate.