Back to results
US 2010/0162195 A1Published application
Method for detecting a weak point
AssigneeHynix Semiconductor Inc.
InventorCheol Kyun KIM
Life of this patent
Estimating the term…
Abstract
A weak point detecting method of the present invention designs a target layout, and compensates an optical proximity effect for the target layout, thereafter, verifies the target layout in which the optical proximity effect is compensated by using an NILS of the target layout, thereby, enabling to reduce the time and cost in detecting a weak point for a full chip regardless of the size and form of a pattern.
Claims9
A method for detecting a weak point, the method comprising:
- providing a target layout;
- compensating for an optical proximity effect on the target layout;
- and
- determining whether or not the optical proximity effect compensation of the target layout is satisfactory by using a Normalized Image Log Slope (NILS) of the target layout.
1 more element
Dependencies are inferred from the claim text.