Method for diagnosing abnormal plasma discharge, abnormal plasma discharge diagnostics system, and computer program

An abnormal plasma discharge diagnostics system, comprising:

• a data obtaining unit adapted to cause a data obtaining section to obtain a time-series data that fluctuates in accordance with the plasma conditions;
• a determinism derivation unit adapted to cause a derivation section to derive a value representing a determinism providing an indicator of whether the time-series data in the plasma is deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit;
• and
• an abnormal discharge determination unit adapted to cause an abnormal discharge determination section to determine that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism derived in the determinism derivation unit is less than or equal to a given threshold value, during the plasma generation.

A computer program for causing a computer to function as the following units in order to diagnose abnormal plasma discharge:

• a data obtaining unit adapted to cause a data obtaining section to obtain a time-series data that fluctuates in accordance with the plasma conditions;
• a determinism derivation unit adapted to cause a derivation section to derive a value representing a determinism providing an indicator of whether the time-series data in the plasma is deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit;
• and
• an abnormal discharge determination unit adapted to cause an abnormal discharge determination section to determine that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism derived in the determinism derivation unit is less than or equal to a given threshold value, during plasma generation.