Semiconductor-processing apparatus equipped with robot diagnostic module
AssigneeASM Japan K.K.
InventorsMasahiro Takizawa, Teruhide Nishino
Life of this patent
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Abstract
A semiconductor-processing apparatus includes: a wafer transfer chamber provided with a wafer transfer robot having an end effector therein, at least one reactor connected to the wafer transfer chamber, and a robot diagnostic module connected to the wafer transfer chamber for diagnosing the transfer robot. The robot diagnostic module includes at least one sensor for detecting a position of the end effector when the end effector is located inside the robot diagnostic module.
Claims18
A semiconductor-processing apparatus comprising:
- a wafer transfer chamber provided with a wafer transfer robot therein, said wafer transfer robot having an end effector for carrying a wafer;
- at least one reactor connected to the wafer transfer chamber, and accessible to the wafer transfer robot;
- and
- a robot diagnostic module connected to the wafer transfer chamber and accessible to the wafer transfer robot for diagnosing the transfer robot, said robot diagnostic module comprising at least one sensor for detecting a position of the end effector when the end effector is located inside the robot diagnostic module.
A method for detecting a deviation of an end effector of a wafer transfer robot for a semiconductor-processing apparatus that comprises:
- (i) a wafer transfer chamber provided with the wafer transfer robot therein and (ii) at least one reactor connected to the wafer transfer chamber and accessible to the wafer transfer robot, said method comprising:
- providing a robot diagnostic module connected to the wafer transfer chamber and accessible to the wafer transfer robot for diagnosing the transfer robot, said robot diagnostic module comprising at least one sensor for detecting a position of the end effector when the end effector is located inside the robot diagnostic module;
- placing the end effector of the wafer transfer robot inside the robot diagnostic module;
- detecting a position of the end effector using the sensor;
- and
- comparing the detected position with a pre-recorded reference position, thereby detecting a deviation of the end effector, if any.
Dependencies are inferred from the claim text.