Visual inspection apparatus and visual inspection method for semiconductor laser chip or semiconductor laser bar
AssigneeSumitomo Electric Industries, Ltd.
InventorNobuyuki MITSUI
Life of this patent
Estimating the term…
Abstract
With a semiconductor laser chip that is an inspection object being pushed up from the back surface of an adhesive sheet by a push-up member and the semiconductor laser chip being positioned above the other semiconductor laser chips, the images of both light-emitting end surfaces of the semiconductor laser chip are taken with CCD cameras. Then, on the basis of information of an image taken by the CCD cameras, an visual inspection unit built in a computer determines the goodness or badness of the appearance of the semiconductor laser chip.
Claims9
An visual inspection apparatus for a semiconductor laser chip or a semiconductor laser bar, the visual inspection apparatus comprising:
- a stage at which an adhesive sheet is placed, a plurality of the semiconductor laser chips or a plurality of the semiconductor laser bars being adhered to a surface of the adhesive sheet;
- a push-up member that pushes up a semiconductor laser chip or a semiconductor laser bar that is an inspection object among the plurality of the semiconductor laser chips or the plurality of the semiconductor laser bars from the back surface of the adhesive sheet to position the semiconductor laser chip or the semiconductor laser bar that is an inspection object above the other semiconductor laser chips or the other semiconductor laser bars;
- a camera that takes an image of a light-emitting end surface of the semiconductor laser chip or the semiconductor laser bar pushed up by the push-up member;
- and
- visual inspecting means for determining the goodness or badness of the image of the appearance of the semiconductor laser chip or the semiconductor laser bar taken by the camera on the basis of information of the image of the light-emitting end surface of the semiconductor laser chip or the semiconductor laser bar taken by the camera.
A method of inspecting an appearance of a semiconductor laser chip or a semiconductor laser bar, the method comprising the steps of:
- placing an adhesive sheet at a stage, a plurality of the semiconductor laser chips or a plurality of the semiconductor laser bars being adhered to a surface of the adhesive sheet;
- pushing up a semiconductor laser chip or a semiconductor laser bar that is an inspection object among the plurality of the semiconductor laser chips or the plurality of the semiconductor laser bars by a push-up member from the back surface of the adhesive sheet to position the semiconductor laser chip or the semiconductor laser bar that is an inspection object above the other semiconductor laser chips or the other semiconductor laser bars;
- taking an image of a light-emitting end surface of the semiconductor laser chip or the semiconductor laser bar pushed up by the push-up member with a camera;
- and
- determining the goodness or badness of the appearance of the semiconductor laser chip or the semiconductor laser bar on the basis of information of the image of the light-emitting end surface of the semiconductor laser chip or the semiconductor laser bar taken by the camera in the imaging step.
Dependencies are inferred from the claim text.