Portable wafer inspection system
AssigneeInotera Memories, Inc.
InventorsYUAN WEN LIU, HUNG CHIH KUO, CHENG FA TSAO
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Abstract
A portable wafer inspection system is applied on an inspection window of a manufacturing tool for wafers. The portable wafer inspection system comprises: a housing, a lighting unit, and an inspection unit. The housing has a receiving room therein, and a plurality of fixing members is disposed at the opening of the housing. The fixing members are used for fixing the housing on the inspection window of the manufacturing tool. The lighting unit and the inspection unit are disposed in the receiving room of the housing, wherein the inspection unit is for capturing images of the wafers. Thereby the inspection unit may be used for inspecting the wafers in the manufacturing tool through the inspection window
Claims16
A portable wafer inspection system applied on an inspection window of a manufacturing tool that manufactures semiconductors, the portable wafer inspection system comprising:
- a housing having a receiving room therein, the housing having a plurality of fixing members at the opening thereof, the fixing members being used for fixing the housing on the inspection window of the manufacturing tool;
- a lighting unit disposed in the receiving room of the housing;
- and
- an inspection unit disposed in the receiving room of the housing for capturing images of wafers;
- wherein the inspection unit is used for inspecting the wafers in the manufacturing tool through the inspection window.
A portable wafer inspection system applied on an inspection window of a manufacturing tool that manufactures semiconductors, the portable wafer inspection system comprising:
- a housing having a receiving room therein, the housing having a plurality of fixing members at the opening thereof, the fixing members being used for fixing the housing on the inspection window of the manufacturing tool;
- a lighting unit disposed in the receiving room of the housing;
- and
- a lens module disposed in the receiving room of the housing for capturing images of wafers;
- wherein the lens module is used for inspecting the linear scrape, particles, or defects of the wafers in the manufacturing tool through the inspection window.
Dependencies are inferred from the claim text.