X-ray reflectometry system with multiple sample holder and individual sample lifting mechanism

An X-ray reflectometry apparatus for examination of a selected sample at a sample measuring position using an X-ray beam, the apparatus comprising:

• an X-ray source, said source configured to emit the X-ray beam for incidence on the selected sample at the sample measuring position;
• an X-ray detector configured to detect the X-ray beam following reflection from a surface of the selected sample located in the sample measuring position;
• a multiple sample holder having a substantially horizontal, one- or two-dimensional array of sample resting positions into which solid samples can be lowered;
• a drive mechanism to move said sample holder in one or two directions within a horizontal plane to place the selected sample directly beneath the sample measuring position;
• a stop disposed directly above the measuring position, said stop having a defined horizontal bottom surface area defining a reference height for the sample measuring position, wherein the samples have corresponding flat top surface areas to define an exact vertical sample position as well as an exact horizontal alignment of the selected sample when it is pressed against said stop and said surfaces engage;
• a sample lift mechanism disposed below said multiple sample holder beneath the sample measuring position, said sample lift mechanism having a vertically movable piston, wherein, upon activation of the sample lift mechanism, said piston moves upwards against a bottom surface of the selected sample and lifts the selected sample until it touches said stop to position and maintain the selected sample in the measuring position, and, upon deactivation of said sample lift mechanism, said piston moves downwards to move said sample into a resting position within said sample holder;
• a spring cooperating with an upper end of said piston to press the sample against said stop with a defined pressure;
• a vertically adjustable knife edge disposed directly above the sample measuring position and configured to limit a measurement area on the selected sample;
• and
• standardized sample containers configured to rest in holes of said sample holder at sample resting positions, said holes having a larger cross-section in upper parts that house said sample containers and smaller cross-sections in lower parts that establish access for said piston to bottoms of said sample containers.