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US 2010/0149627 A1Published application
Support structure for mems device and methods therefor
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorsTeruo Sasagawa, Clarence Chui, Manish Kothari, SuryaPrakash Ganti, Jeffrey B. Sampsell, Chun-Ming Wang
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Abstract
A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.
Claims20
A microelectromechanical systems device comprising:
- a substrate having a first electrode layer formed thereon;
- a second electrode layer spaced apart from the first electrode layer by a cavity;
- at least one support structure comprising side surfaces surrounding the support structure, wherein the at least one support structure is configured to support the second electrode layer;
- and
- a protective material surrounding the at least one support structure to laterally isolate the at least one support structure from the cavity, wherein the protective material further covers at least a portion of a top surface of the support structure, and wherein a portion of the protective material is positioned between the second electrode layer and the top surface of the support structure.
2 more elements
A method of making an interferometric modulator device, comprising:
- providing a substrate having a first electrode layer formed over the substrate;
- surrounding side surfaces of at least one support structure with a protective material while covering at least a portion of a top surface of the support structure with the protective material;
- and
- creating a cavity between the first electrode layer and a second electrode layer after surrounding the at least one support structure.
1 more element
Dependencies are inferred from the claim text.