Digital micro-mirror device
AssigneeSilverbrook Research Pty Ltd
InventorsGregory John McAvoy, Ronan Padraig Sean O'Reilly, Vincent Patrick Lawlor, Kia Silverbrook
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Abstract
A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.
Claims20
A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate, each micro-mirror assembly comprising:
- a mirror spaced apart from the substrate, said mirror having an upper reflective surface and a lower support surface;
- a stem supporting said mirror, said stem extending from said substrate to said lower support surface, said stem defining a tilt axis for said mirror;
- a first electrode and a second electrode, said first and second electrodes being positioned on either side of said stem, each electrode being individually addressable via electronic circuitry in said substrate,
- wherein said stem is comprised of a resiliently flexible material, such that said mirror can tilt either towards said first electrode or towards said second electrode by an electrostatic force.
Dependencies are inferred from the claim text.