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US 2010/0149615 A1Published application
Vibrating Mirror Element
AssigneeFunai Electric Co., Ltd.
InventorsHidetoshi Kotera, Isaku Kanno, Manabu Murayama, Naoki Inoue
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Abstract
This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.
Claims20
A vibrating mirror element comprising:
- a mirror portion reflecting light;
- a torsionally deformable beam portion connected to said mirror portion for supporting said mirror portion in a vibratile manner;
- and
- a driving portion having a connecting portion connected with said beam portion for driving said mirror portion through said torsionally deformable beam portion, wherein
- the width of said connecting portion of said driving portion is rendered smaller than the width of a portion of said driving portion other than said connecting portion in plan view.
2 more elements
Dependencies are inferred from the claim text.