Optical metrology system
AssigneesLaboratoire National De Metrologie Et D'Essais, Conservatoire National Des Arts Et Metiers
InventorsPatrick Juncar, Darine Haddad, Gerard Geneves
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Abstract
Device for positioning an object with respect to a reference position, characterized in that it comprises a laser (1), associated with an acousto-optical modulator (3) for emitting at least two parallel laser beams modulated in phase opposition, said beams being focused on a slot (F) integral with the object (OBJ) to be positioned, the large side of said slot (F) being perpendicular to the direction of positioning, and a photodiode (13) suitable for collecting the beams emanating from the slot (F) and associated with a synchronous-detection amplifier (9) for delivering a signal expressing the position of the slot (F) with respect to the reference position.
Claims9
A device for positioning an object with respect to a reference position, characterized by the fact that it comprises a laser (1), associated with an acousto-optical modulator (3) for emitting at least two parallel laser beams modulated in phase opposition, said beams being focused on a slot (F) integral with the object (OBJ) to be positioned, the large side of said slot (F) being perpendicular to the direction of positioning, and a photodiode (13) suitable for collecting the beams emanating from the slot (F) and associated with a synchronous-detection amplifier (9) for delivering a signal expressing the position of the slot (F) with respect to the reference position.
A method for positioning an object with respect to a reference position in which a variation in position of an object (OBJ) with respect to a reference position is detected as a function of an intensity variation of two laser beams modulated in phase opposition emerging from a slot integral with the object (OBJ) to be positioned.
Dependencies are inferred from the claim text.