Liquid ejecting head, liquid ejecting apparatus, and piezoelectric actuator
AssigneeSeiko Epson Corporation
InventorsJiro KATO, Satoshi DENDA, Ichiro ASAOKA
Life of this patent
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Abstract
A liquid ejecting head includes a pressure generating chamber that communicates with a nozzle opening and a piezoelectric element that includes: a first electrode; a piezoelectric body layer that is formed on the first electrode and which has a perovskite structure with a general formula of ABO3, and a second electrode that is formed the piezoelectric body layer. There is lead in a B site of the piezoelectric body layer, and the peak position of A1(3LO) for a Raman shift of the piezoelectric body layer that is acquired by Raman scattering is 710 cm−1 to 712 cm−1.
Claims13
A liquid ejecting head comprising:
- a pressure generating chamber that communicates with a nozzle opening;
- and
- a piezoelectric element that includes:
- a first electrode;
- a piezoelectric body layer that is formed above the first electrode and which has a perovskite structure with a general formula of ABO3;
- and
- a second electrode that is formed above the piezoelectric body layer,
- wherein there is lead in a B site of the piezoelectric body layer, and
- wherein the peak position of A1(3LO) for a Raman shift of the piezoelectric body layer that is acquired by Raman scattering is 710 cm−1 to 712 cm−1.
A piezoelectric actuator comprising:
- a first electrode;
- a piezoelectric body layer that is formed above the first electrode and which has a perovskite structure with a general formula of ABO3;
- and
- a second electrode that is formed above the piezoelectric body layer,
- wherein there is lead in a B site of the piezoelectric body layer, and
- wherein the peak position of A1(3LO) for a Raman shift of the piezoelectric body layer that is acquired by Raman scattering is 710 cm−1 to 712 cm−1.
A liquid ejecting apparatus comprising:
- an ink supply;
- an ink supply flowing path;
- and
- a liquid ejecting head comprising:
- a pressure generating chamber that communicates with the ink supply flowing path so that ink is supplied from the ink supply to a nozzle opening;
- and
- a piezoelectric element that includes:
- a first electrode;
- a piezoelectric body layer that is formed above the first electrode and which has a perovskite structure with a general formula of ABO3;
- and
- a second electrode that is formed above the piezoelectric body layer,
- wherein there is lead in a B site of the piezoelectric body layer, and
- wherein the peak position of A1(3LO) for a Raman shift of the piezoelectric body layer that is acquired by Raman scattering is 710 cm−1 to 712 cm−1
Dependencies are inferred from the claim text.