Liquid ejecting head, liquid ejecting apparatus, actuator device, and manufacturing method of liquid ejecting head

An actuator device comprising:

• a piezoelectric element having a first electrode provided above a substrate, a piezoelectric body layer provided above the first electrode, and a second electrode provided above the piezoelectric body layer,
• wherein the first electrode formed in the region facing the region where the piezoelectric body layer is formed includes:
• a first electrically-conductive layer;
• and
• a second electrically-conductive layer which is made of a material having a smaller Young's modulus than that of the first electrically-conductive layer and is formed closer to the flow path forming substrate than the first electrically-conductive layer, and
• the first electrode formed in the region facing the region where the piezoelectric body layer is not formed has a surface constituted of the second electrically-conductive layer.

A method of manufacturing a liquid ejecting head including a piezoelectric element having a first electrode provided above a flow path forming substrate, a piezoelectric body layer provided so as to correspond to each pressure generation chamber, and a second electrode provided above the piezoelectric body layer, wherein the first electrode, which is formed in the region facing the region where the piezoelectric body layer is formed, includes a first electrically-conductive layer;

• and a second electrically-conductive layer, which is made of a material having a smaller Young's modulus than that of the first electrically-conductive layer and is formed closer to the flow path forming substrate than the first electrically-conductive layer,
• the method comprising:
• forming the first electrode above the flow path forming substrate;
• and
• forming the piezoelectric element by forming the piezoelectric body layer and the second electrode above the first electrode and patterning the piezoelectric body layer and the second electrode,
• wherein in the step of forming the piezoelectric element, the first electrode is removed up to a portion in the thickness direction of the second electrically-conductive layer along with the patterning of the piezoelectric body layer.