System and method for acoustic ejection of drops from a thin layer of fluid
AssigneePalo Alto Research Center Incorporated
InventorScott A. Elrod
Life of this patent
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Abstract
Features described herein relate to ejecting drops from a thin layer of fluid. Piezoelectric elements can generate a uniform high acoustic field, which is transferred through a segmented metal support structure and an acoustic horn. The sound waves generate capillary waves on a thin layer of fluid on a top surface of the acoustic horn. At sufficiently high amplitudes, the capillary waves begin to break apart, resulting in the ejection of drops from the thin layer of fluid.
Claims20
An apparatus for ejecting drops, the apparatus comprising:
- a partially or fully segmented support structure comprising a first side and a second side with a plurality of extending elements;
- piezoelectric elements in operative connection to at least some of the extending elements of the partially or fully segmented metal support structure on the first side;
- and
- an acoustic horn in operative connection to the second side of the partially or fully segmented support structure, a thickness of the acoustic horn decreases as distance increases from the second side of the partially or fully segmented support structure, the acoustic horn configured to resonate from energy emitted from the piezoelectric elements and transferred through the partially or fully segmented support structure.
A method for ejecting drops, the method comprising:
- placing a thin layer of fluid above a top surface of an acoustic horn, the acoustic horn being attached to a fully or partially segmented support structure, the fully or partially segmented support structure comprising extending elements in operative connection to piezoelectric elements;
- producing sound waves with the piezoelectric elements;
- relaying the sound waves through the fully or partially segmented support structure;
- resonating the acoustic horn with the sound waves;
- and
- ejecting droplets from the thin layer of fluid.
A system for depositing liquid on a substrate, the system comprising:
- a fully or partially segmented support structure comprising a first side and a second side;
- piezoelectric elements in operative connection to the first side of the fully or partially segmented support structure;
- and
- an acoustic horn in operative connection to the second side of the fully or partially segmented support structure, a thickness of the acoustic horn decreases as distance increases from the second side of the fully or partially segmented support structure, the acoustic horn configured to resonate from energy emitted from the piezoelectric elements and transferred through the fully or partially segmented support structure.
Dependencies are inferred from the claim text.