Ink jet head and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsAkihiko Okano, Masahiko Kubota, Ryoji Kanri, Atsushi Hiramoto
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Abstract
An ink jet head includes a Si substrate with a surface having a {100} orientation; a passage holding ink on the Si substrate; an ink discharge port which is communicatively connected to the passage and through which ink is ejected; and a supply port which extends through the Si substrate, which is communicatively connected to the passage, and which supplies ink to the passage. The supply port has walls having two {111} planes facing each other.
Claims10
An ink jet head comprising:
- a Si substrate with a surface having a {100} orientation;
- a passage holding ink on the Si substrate;
- an ink discharge port which is communicatively connected to the passage and through which ink is ejected;
- and
- a supply port which extends through the Si substrate, which is communicatively connected to the passage, and which supplies ink to the passage,
- wherein the supply port has walls having two {111} planes facing each other.
A method of manufacturing an ink jet head that includes a Si substrate carrying an energy-generating element, disposed thereon, generating energy used to eject ink through a discharge port and also includes a substrate having a supply port used to supply ink to the energy-generating element, the method comprising:
- forming a hole in the back surface of the Si substrate by processing the Si substrate such that the hole extends from the back surface toward front surface of the Si substrate along a {111} plane present in the Si substrate, the Si substrate having a surface with a {100} orientation;
- and
- forming the supply port by subjecting the Si substrate to anisotropic wet etching such that the supply port extends from the hole.
Dependencies are inferred from the claim text.