Method and System for Forming Resonators Over CMOS
AssigneeTexas Instruments Incorporated
InventorsArun K. Gupta, Lance W. Barron, William C. McDonald
Life of this patent
Estimating the term…
Abstract
In accordance with one embodiment of the present disclosure, a semiconductor substrate includes complementary metal-oxide-semiconductor (CMOS) circuitry disposed outwardly from the semiconductor substrate. An electrode is disposed outwardly from the CMOS circuitry. The electrode is electrically coupled to the CMOS circuitry. A resonator is disposed outwardly from the electrode. The resonator is operable to oscillate at a resonance frequency in response to an electrostatic field propagated, at least in part, by the electrode.
Claims20
A semiconductor substrate comprising:
- complementary metal-oxide-semiconductor (CMOS) circuitry disposed outwardly from the semiconductor substrate;
- an electrode disposed outwardly from the CMOS circuitry and electrically coupled to the CMOS circuitry;
- and
- a resonator disposed outwardly from the electrode, the resonator operable to oscillate at a resonance frequency in response to an electrostatic field propagated, at least in part, by the electrode.
A semiconductor device comprising:
- a substrate comprising complementary metal-oxide-semiconductor (CMOS) circuitry;
- and
- a plurality of resonators, each resonator overlaying, and spaced apart from, a respective portion of the CMOS circuitry, and each resonator having a corresponding resonance frequency.
A method comprising:
- forming complementary metal-oxide-semiconductor (CMOS) circuitry outwardly from a substrate, the CMOS circuitry capable of providing an electric signal that contributes to at least a portion of an electrostatic field;
- forming a sacrificial layer outwardly from the CMOS circuitry;
- forming a resonator outwardly from the sacrificial layer;
- and
- removing at least a portion of the sacrificial layer disposed inwardly from the resonator such that the resonator is operable to oscillate at a resonance frequency in response, at least in part, to the electrostatic field.
Dependencies are inferred from the claim text.