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US 2010/0148718 A1Published application
Semiconductor element and electrical apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsMakoto Kitabatake, Osamu Kusumoto, Masao Uchida, Kenya Yamashita
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Abstract
A semiconductor element (20) of the present invention includes a plurality of field effect transistors (90) and a schottky electrode (9a), and the schottky electrode (9a) is formed along an outer periphery of a region where the plurality of field effect transistors (90) are formed.
Claims12
A semiconductor element comprising
- a plurality of field effect transistors each including:
- a semiconductor layer made of a wide band-gap semiconductor;
- a first source/drain region which is a first conductivity type and formed in said semiconductor layer so as to include an upper surface of said semiconductor layer;
- a second conductivity type region which is a second conductivity type and formed in said semiconductor layer so as to include the upper surface and said first source/drain region;
- a drift region which is a first conductivity type and formed in said semiconductor layer so as to include the upper surface and said second conductivity type region;
- a first source/drain electrode which is formed so as to contact at least the upper surface of said first source/drain region;
- a gate electrode which is formed so as to face at least the upper surface of said second conductivity type region with a gate insulating film provided between said gate electrode and said second conductivity type region;
- and
- a second source/drain electrode which is connected to said drift region in an ohmic manner, and
- a schottky electrode which is disposed on the upper surface of said drift region so as to form a schottky junction with the upper surface of said drift region,
- wherein:
- said semiconductor layer is divided into a plurality of cells by a virtual border line in plan view;
- said drift region and said second source/drain electrode are formed so as to extend over the plurality of cells;
- the plurality of cells are constituted of a transistor cell in which said field effect transistor is formed and a diode cell in which said schottky electrode is formed;
- the plurality of transistor cells are formed adjacent to each other in a transistor forming region;
- and
- a diode forming region where the diode cells, the number of which is one or more, are formed is formed so as to surround the transistor forming region.
14 more elements
(canceled)
Dependencies are inferred from the claim text.