Method for improving motion times of a stage
AssigneeFormFactor, Inc.
InventorsSun Yalei, Uday Nayak, Richard J. Casler, JR., Thomas Rohrs
Life of this patent
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Abstract
Methods and systems for, in one embodiment, accelerating a stage through a clearance height in a first direction and decelerating the stage in the first direction while accelerating in a second direction are shown. The stage is moved in a third direction and a determination is made whether the stage movement in the second direction is below a threshold value before continuing to move the stage further in the third direction. The first direction is perpendicular to the second direction and is parallel and opposite to the third direction.
Claims25
A method of moving a stage comprising:
- accelerating a stage through a clearance height in a first direction;
- decelerating, after the accelerating through the clearance height, the stage in the first direction while accelerating the stage in a second direction;
- moving the stage in a third direction, wherein the first direction is perpendicular to the second direction and is parallel and opposite to the third direction.
A method of moving a stage comprising:
- moving the stage in a first vertical direction beyond a clearance height, and continuing to move the stage in the first vertical direction and begin moving the stage in a lateral direction after moving beyond the clearance height and while continuing to move the stage in the first vertical direction;
- and
- moving the stage in a second vertical direction toward a settle check point.
A method of moving a stage comprising:
- accelerating a stage in a vertical direction through a clearance height during a first time period;
- and
- decelerating the stage during a second time period, wherein the first time period is greater than the second time period.
A machine readable medium having stored thereon data representing sequences of instructions, which when executed by a computer system cause the computer system to perform a method comprising:
- accelerating a stage through a clearance height in a first vertical direction.
- decelerating, after the accelerating through the clearance height, the stage in the first direction while accelerating the stage in a second direction;
- moving the stage in a third direction, wherein the first direction is perpendicular to the second direction and is parallel and opposite to the third direction.
A machine readable medium having stored thereon data representing sequences of instructions, which when executed by a computer system cause the computer system to perform a method comprising:
- moving the stage in a first vertical direction beyond a clearance height, and continuing to move the stage in the first vertical direction and begin moving the stage in a lateral direction after moving beyond the clearance height and while continuing to move the stage in the first vertical direction;
- and
- moving the stage in a second vertical direction to a settle check point.
A system comprising:
- a base;
- a stage supported by the base, the stage being configured to move in a three-dimensional coordinate system;
- at least one motor connected with the stage for moving the stage in the three-dimensional coordinate system, the at least one motor being configured to accelerate the stage through a clearance height in a first direction and the at least one motor is configured to decelerate the stage in the first direction and to accelerate the stage in a second direction simultaneously;
- at least one sensor coupled with the stage, the sensor being configured to measure a stage parameter;
- and
- a control system coupled with the at least one sensor, the control system being configured to receive information from the at least one sensor and determining operating parameters of the at least one motor based on a clearance height parameter.
An apparatus comprising:
- a support frame;
- a base supported by the support frame;
- a stage supported by the base, the stage being configured to move in a three-dimensional coordinate system having three axis of motion;
- at least one motor connected with the stage for moving the stage in the three-dimensional coordinate system, the at least one motor being configured to accelerate the stage through a clearance height in a first axis of motion and decelerating the stage in both the first axis of motion and a second axis of motion simultaneously;
- and
- at least one sensor coupled with the stage, the sensor being configured to measure a stage acceleration.
Dependencies are inferred from the claim text.