Electron column using cnt-tip and method for alignment of cnt-tip
OwnerHo Seob Kiminventor
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Abstract
The present invention relates to an electron column using an electron emission source, to which one or more carbon nanotubes (CNTs) are attached, in an electron column structure including an electron emission source and lenses. More particularly, the present invention relates to a method of easily aligning a carbon nanotube (CNT) tip, and an electron column capable of using the method.
Claims17
An electron column including an electron emission source and electron lenses, wherein the electron emission source uses one or more carbon nanotubes (CNTs) in order to emit electrons.
A method of aligning one or more CNTs of an electron emission source to which the CNTs are attached, the method comprising:
- aligning the electron emission source on which the CNTs are attached or deposited with electron lens layers that form electric fields so that electrons are emitted from the electron emission source;
- and
- radiating an ion beam onto a carbon nanotube (CNT) tip in a vertical direction through apertures of the electron lens layers.
Dependencies are inferred from the claim text.