Ultrasonic Transducer And Manufacturing Method Thereof
AssigneeHitachi, Ltd.
InventorsShuntaro Machida, Hiroyuki Enomoto, Yoshitaka Tadaki, Tatsuya Nagata
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Abstract
An ultrasonic transducer includes a first electrode, a second electrode, an insulating film disposed between the first and second electrodes, and a cavity disposed between the first and second electrodes. The insulating film includes a projection extending in the cavity, and a portion of the cavity is disposed between the projection and the first electrode. A portion of one of the first electrode and the second electrode has an opening corresponding to a position of the projection of the insulating film when viewed in plan view.
Claims14
An ultrasonic transducer, comprising:
- a first electrode;
- a second electrode;
- an insulating film disposed between the first and second electrodes;
- and
- a cavity disposed between the first and second electrodes;
- wherein the insulating film includes a projection extending in the cavity;
- wherein a portion of the cavity is disposed between the projection and the first electrode;
- and
- wherein a portion of one of the first electrode and the second electrode has an opening corresponding to a position of the projection of the insulating film when viewed in plan view.
An ultrasonic transducer comprising:
- a first electrode;
- a second electrode including an opening;
- a cavity disposed between the first and second electrodes;
- an insulating film, disposed between the first and second electrodes including a projection corresponding to a position of the opening when viewed in plan view;
- and
- a cavity disposed between the first and second electrodes so that a portion of the cavity is disposed between the projection and one of the first and second electrodes.
An ultrasonic transducer, comprising:
- a first electrode;
- a cavity disposed over the first electrode;
- an insulating film disposed over the first electrode;
- and
- a second electrode disposed over the cavity;
- wherein the insulating film includes a projection extending in the cavity so that a portion of the cavity is disposed between the projection of the insulating film and the first electrode;
- and
- wherein at least a portion of at least one of the first electrode and the second electrode has an opening corresponding to a position of the projection of the insulating film when viewed in plan view.
Dependencies are inferred from the claim text.