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US 2010/0148397 A1Published application
Imprinting machine and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsTakashi NAKAMURA, Hirohisa OTA, Eigo KAWAKAMI, Kazuyuki KASUMI, Toshinobu TOKITA
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Abstract
An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.
Claims2
An imprinting machine that brings a mold with a pattern surface having a pattern into contact with an uncured resin on an object and forms a pattern of a cured resin on the object, said imprinting machine comprising:
- a mold stage configured to hold the mold and to be moved;
- an object stage configured to hold the object and to be moved;
- a measurement device configured to perform a measurement of a position of an alignment mark formed on the object relative to an alignment mark formed on the pattern surface;
- an auxiliary actuator other than actuators of the mold stage and the object stage and configured to move the mold and the object relatively;
- and
- a controller configured to cause the mold stage and the object stage to be moved relatively such that the mold and the uncured resin contact with each other, to cause the measurement device to perform the measurement while the mold and the uncured resin contact with each other, and to cause the mold stage and the object stage to be moved relatively and cause the auxiliary actuator to operate such that the mold and the object are aligned based on the performed measurement while the mold and the uncured resin contact with each other.
3 more elements
Dependencies are inferred from the claim text.