Three-Dimensional Semiconductor Template for Making High Efficiency Thin-Film Solar Cells
AssigneeSolexel, Inc.
InventorsDavid Xuan-Qi Wang, Mehrdad M. Moslehi
Life of this patent
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Abstract
A semiconductor template having a top surface aligned along a (100) crystallographic orientation plane and an inverted pyramidal cavity defined by a plurality of walls aligned along a (111) crystallographic orientation plane. A method for manufacturing a semiconductor template by selectively removing silicon material from a silicon template to form a top surface aligned along a (100) crystallographic plane of the silicon template and a plurality of walls defining an inverted pyramidal cavity each aligned along a (111) crystallographic plane of the silicon template.
Claims20
A three-dimensional semiconductor template, comprising:
- a top surface aligned along a (100) crystallographic orientation plane of the semiconductor template;
- and
- a plurality of walls each aligned along a (111) crystallographic orientation plane of the semiconductor template wherein said walls define an inverted pyramidal cavity.
A method for fabrication of a three-dimensional silicon template, the method comprising:
- selectively removing silicon material from a silicon template to form a top surface aligned along a (100) crystallographic plane of the silicon template and a plurality of walls each aligned along a (111) crystallographic plane of the silicon template wherein said walls define an inverted pyramidal cavity.
A three-dimensional semiconductor template comprising a plurality inverted pyramidal cavities defined by a plurality of walls each aligned along a (111) crystallographic orientation plane of the semiconductor template and wherein said inverted pyramidal cavities were created according to an anisotropic etching process.
Dependencies are inferred from the claim text.