Integrated structure of mems device and cmos image sensor device and fabricating method thereof

A method for fabricating an integrated structure of MEMS device and CMOS image sensor (CIS) device comprising steps of:

• providing a substrate having a CIS region and a MEMS region defined therein, the CIS region comprising a plurality of CIS devices;
• performing a multilevel interconnect process to form a multilevel interconnect structure in the CIS region and the MEMS region on a front side of the substrate, and simultaneously to form a micro-machined mesh metal in the MEMS region on the front side of the substrate;
• performing a first etching process to form a chamber and release the micro-machined mesh metal in the MEMS region;
• forming a first mask pattern and a second mask pattern respectively in the CIS region and the MEMS region on a back side of the substrate, the first mask pattern respectively corresponding to the CIS devices and the second mask pattern used to define a plurality of vent holes in the MEMS region;
• and
• performing a second etching process to etch the back side of the substrate through the second mask pattern to form the vent holes connecting to the chamber.