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US 2010/0148282 A1Published application
Wafer joining method, wafer composite, and chip
OwnerDieter Donis, Jens Koeniginventors
Life of this patent
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Abstract
A method for joining a first wafer to at least a second wafer. The method is characterized by the following operations of depositing a sinterable bonding material on at least one of the wafers, joining the wafers, and sintering the bonding material by heating. Furthermore, a wafer composite and a chip are also described.
Claims23
1-15. (canceled)
A method for joining a first wafer to at least a second wafer, the method comprising:
- depositing a sinterable bonding material on at least one of the wafers;
- joining the first wafer to the at least a second wafer;
- and
- sintering the bonding material through heating.
1 more element
A wafer composite, comprising:
- a first wafer;
- at least a second wafer, wherein at least two of the wafers are joined together, and wherein the wafers are fixed to each other via a sintered bonding material disposed between the wafers;
- wherein the first wafer is joined to the at least a second wafer, by depositing the sinterable bonding material on at least one of the wafers, joining the first wafer to the at least a second wafer, and sintering the bonding material through heating.
A sensor chip, including at least two wafer material levels, comprising:
- a first wafer material level;
- at least a second wafer material level, wherein at least two of the wafer material levels are joined together, and wherein the wafer material levels are fixed to each other via a sintered bonding material disposed between the wafer material levels;
- wherein the first wafer material level is joined to the at least a second wafer material level, by depositing the sinterable bonding material on at least one of the wafer material levels, joining the first wafer material level to the at least a second wafer material level, and sintering the bonding material through heating.
Dependencies are inferred from the claim text.