Electronic device including an insulating layer having different thicknesses and a conductive electrode and a process of forming the same

An electronic device comprising:

• a semiconductor layer having a primary surface and a trench therein extending from the primary surface;
• a conductive structure within the trench;
• a gate electrode overlying the semiconductor layer;
• an insulating layer including a first region and a second region, wherein the second region is thicker than the first region, the gate electrode lies closer to the first region than the second region, and the second region overlies the conductive structure;
• and
• a conductive electrode overlying the first and second regions of the insulating layer and the conductive structure.

A process of forming an electronic device comprising:

• providing a workpiece comprising a substrate, including a underlying doped region, and a semiconductor layer overlying the underlying doped region, wherein the semiconductor layer has a primary surface spaced apart from the underlying doped region;
• forming an insulating layer over the semiconductor layer, wherein the insulating layer has a first region and a second region, and the first region is thinner than the second region;
• forming a conductive electrode over the first and second regions of the insulating layer;
• and
• forming a source region that lies closer to the first region of the insulating layer compared to the second region of the insulating layer.