Fabrication method of a light-emitting element and the light-emitting element
OwnerShiuh CHAO, Chen-Yang Huang +1inventors
InventorsShiuh CHAO, Chen-Yang Huang, Hao-Min Ku
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Abstract
A fabrication method of the light emitting element and its light emitting element are disclosed herein. It utilizes the membrane forming technology to form optic films arranged in array on a substrate and then upward forming the epitaxial layer by the epitaxial lateral overgrowth (ELOG) technology so as to form light-emitting elements in array. The optic films contribute to the high reflection property and can sustain high temperature in the ELOG process.
Claims28
A fabrication method of a light-emitting element of which steps comprises:
- providing a substrate;
- forming a first optical layer on said substrate;
- removing a portion of said first optical layer to form a plurality of patterned first optical films, wherein said patterned first optical films are arranged in array on said substrate;
- forming a first semiconductor layer on said substrate and on said patterned first optical films in order via an epitaxial lateral overgrowth procedure, covering said substrate and said patterned first optical films;
- forming a light-emitting layer and a second semiconductor layer on said first semiconductor layer in order;
- and
- removing a portion of said first semiconductor layer, said light-emitting layer and said second semiconductor layer to form a plurality of patterned first semiconductor films, a plurality of patterned light-emitting films, and a plurality of second semiconductor films on said patterned first semiconductor films simultaneously.
A light-emitting element comprising:
- a substrate;
- a plurality of patterned first optical films arranged in array on said substrate;
- a plurality of patterned first semiconductor films, arranged on said patterned first optical films;
- a plurality of patterned light-emitting films, arranged on said patterned first semiconductor films;
- and
- a plurality of patterned second semiconductor films, arranged on said patterned light-emitting films.
The light-emitting semiconductor element further comprises a plurality of electrodes arranged on said patterned first semiconductor films and said patterned second semiconductor films.
Dependencies are inferred from the claim text.