Stamper, stamper testing method, and stamper testing apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsKazuyo Umezawa, Seiji Morita, Masatoshi Sakurai
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Abstract
According to one embodiment, a stamper has a data area and servo area, and has concentric or spiral grooves formed in the data area. Phases αE and αH at which differential signal levels of the E- and H-polarized light are maximum when the data area is irradiated with a laser beam have a relationship represented by (αE+αH)≦270°
Claims4
A stamper comprising either a concentric three-dimensional pattern or a spiral three-dimensional pattern, configured to form a track pattern on a surface of a recording layer of a recording medium comprising a data area and a servo area,
- wherein a first phase αE and a second phase αH, at which a differential signal level of E- and H-polarized light components of reflected light becomes substantially maximum, are calculated when the three-dimensional pattern of the stamper corresponding to the data area of the recording medium is irradiated with the E- and H-polarized light components of linearly polarized light with a laser beam, and the first phase αE and the second phase αH satisfy a relationship represented by
- (αE+αH)≦
- 270°
A method of testing a groove shape of either a concentric three-dimensional pattern or a spiral three-dimensional pattern on a stamper for forming a track pattern on a surface of a recording layer of a recording medium comprising a data area and a servo area, comprising:
- irradiating a data portion of the stamper with the E- and H-polarized components of linearly polarized light by a semiconductor laser, and measuring a voltage of a differential signal of reflected light by changing a phase;
- and
- obtaining a first phase αE and a second phase αH at which difference signal voltages of the E- and the H-polarized light are maximum respectively, and determining the quality of the groove shape from the sum (αE+αH).
An apparatus for testing a groove shape of either a concentric three-dimensional pattern or a spiral three-dimensional pattern on a stamper for forming a track pattern on a surface of a recording layer of a recording medium comprising a data area and a servo area, comprising:
- a measurement module configured to irradiate a data portion of the stamper with the E- and H-polarized components of linearly polarized light by a semiconductor laser, and to measure a voltage of a differential signal of reflected light by changing a phase;
- and
- a determination module configured to obtain a first phase αE and a second phase αH at which difference signal voltages of the E- and H-polarized light are maximum, and to determine the quality of the groove shape from the sum (αE+αH).
Dependencies are inferred from the claim text.